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Progress In Electromagnetics Research M
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COMPACT, BROADBAND AND RELIABLE LATERAL MEMS SWITCHING NETWORKS FOR 5G COMMUNICATIONS

By S. Dey, S. K. Koul, A. K. Poddar, and U. L. Rohde

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Abstract:
The design, development and characterization of broadband (1-30 GHz) microelectromechanical systems (MEMS) based electrostatically driven lateral switching networks are presented in this paper. Initially, single switch performances are optimized, and later it is used to develop different switching networks like single-pole-double-throw (SPDT), single-pole-three-throw (SP3T), and single-pole-six-throw (SP6T). All switches are extensively characterized including reliability testing. Switching networks demonstrate measured return loss of better than 21 dB (11.4 dB) with worst case insertion loss of 0.67 dB (~5 dB) and isolation of better than 31 dB (17.7 dB) at 3.5 GHz (28 GHz) for 5G communications. Switching networks tested for > 1 billion cycles with 1 W of RF power are found to be operational. Maximum fabricated switch (SP6T) area is ~0.7 mm2 including bias lines and pads.

Citation:
S. Dey, S. K. Koul, A. K. Poddar, and U. L. Rohde, "Compact, Broadband and Reliable Lateral MEMS Switching Networks for 5G Communications," Progress In Electromagnetics Research M, Vol. 86, 163-171, 2019.
doi:10.2528/PIERM19091703

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