volume | PIER Journals

2012-11-14

Characterization of a Sub-mm Wave Frequency Selective Surface on a Periodically Perforated Silicon Substrate

Angel Colin

Dr. Angel Colin

Instituto Nacional de Astrofísica, Óptica y Electrónica (INAOE)

Mexico

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Progress In Electromagnetics Research M, Vol. 27, 75-81, 2012

doi:10.2528/PIERM12091216

Abstract

We carried out measurements of optical transmission through a Frequency Selective Surface (FSS) on a silicon substrate perforated periodically with square cavities of 1 mm². The substrate is covered on one side with a thin film (1 μm thick) of silicon-nitride, thus forming a membrane for each cavity. The measurements were taken using a Martin-Puplett Interferometer over a spectral range from 100 to 650 GHz, providing a maximum transmission value of around 40% at 480 GHz. Analytical and computed results are also presented for comparison purposes.

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Angel Colin, "Characterization of a Sub-mm Wave Frequency Selective Surface on a Periodically Perforated Silicon Substrate," Progress In Electromagnetics Research M, Vol. 27, 75-81, 2012.
doi:10.2528/PIERM12091216

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