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Progress In Electromagnetics Research B
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DESIGN AND FABRICATION OF RF-MEMS SWITCH FOR V-BAND RECONFIGURABLE APPLICATION

By T. M. Vu, G. Prigent, J. Ruan, and R. Plana

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Abstract:
This paper presents a study of RF MEMS switch designed to be integrated in tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, we go into detail of each procedure to present a complete study from design to fabrication and characterization of a RF-MEMS switch. The proposed concepts are validated by experimental results.

Citation:
T. M. Vu, G. Prigent, J. Ruan, and R. Plana, "Design and Fabrication of RF-MEMS Switch for V-Band Reconfigurable Application," Progress In Electromagnetics Research B, Vol. 39, 301-318, 2012.
doi:10.2528/PIERB12021404

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