Vol. 34

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Analytical Optimization of High Performance and High Quality Factor MEMS Spiral Inductor

By Parsa Pirouznia and Bahram Azizollah Ganji
Progress In Electromagnetics Research M, Vol. 34, 171-179, 2014


In this paper, design and simulation of optimized MEMS spiral inductor are presented. The effects of design parameters on characteristics of inductor have been considered. The suspended spiral inductor was designed on silicon substrate using MEMS technology to reduce the metal and substrate losses of inductor. The results show that the quality factor of the inductor is 27 at 5.23 GHz and that the maximum Q-factor is 42 at 26.56 GHz. The dimension of the inductor is 185×200 μm2, which occupies less area on chip than other works. In this work, the high quality factor inductor with small size is obtained.


Parsa Pirouznia and Bahram Azizollah Ganji, "Analytical Optimization of High Performance and High Quality Factor MEMS Spiral Inductor," Progress In Electromagnetics Research M, Vol. 34, 171-179, 2014.


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