PIER M
 
Progress In Electromagnetics Research M
ISSN: 1937-8726
Home | Search | Notification | Authors | Submission | PIERS Home | EM Academy
Home > Vol. 72 > pp. 165-174

FABRICATION AND PRESSURE SENSING CHARACTERIZATION OF AN ULTRATHIN EGG-SHAPED MICROBUBBLE

By G. Wang, M. Huang, J. Liu, Y. Li, S. Zhang, X.-F. Wan, M. S. Sardar, J. Han, Q. Song, and Z. Gui

Full Article PDF (902 KB)

Abstract:
In this paper, an ultrathin egg-shaped microbubble was proposed and analyzed for pressure sensing firstly, which was fabricated by utilizing an improved pressure-assisted arc discharge technique. By tailoring the arc parameters and the position of glass tube during the fabrication process, the thinnest wall of the fabricated microbubble could reach 873 nm. Such an ultrathin film structure is very suitable for pressure sensing. Especially, as only a commercial fusion splitter and pressure pump were utilized to achieve such functions, the fabrication cost was very cheap. The fiber Fabry-Perot (FP) interference technique was used to analyze its pressure sensitivity by filling the inner wall of the microbubble with different air pressures. The experiment results depicted that the end face of microbubble expands with the increase of the filling pressure. The pressure sensitivity of such an egg-shaped microbubble could reach up to 14.3 pm/kPa in terms of interference spectrum shift, while the maximum cavity deformation sensitivity of the microbubble vs. pressure could reach up to 0.334 nm/kPa in terms of cavity length change. Besides, the maximum sensitivity vs. temperature was only 27.83 pm/˚C. Results of this study could be good reference for developing new pressure sensors with low cost, high sensitivity and good anti-temperature interference abilities.

Citation:
G. Wang, M. Huang, J. Liu, Y. Li, S. Zhang, X.-F. Wan, M. S. Sardar, J. Han, Q. Song, and Z. Gui, "Fabrication and Pressure Sensing Characterization of an Ultrathin Egg-Shaped Microbubble," Progress In Electromagnetics Research M, Vol. 72, 165-174, 2018.
doi:10.2528/PIERM18050602
http://www.jpier.org/pierm/pier.php?paper=18050602

References:
1. Wu, J. X., C. Jan, and O. Solgaard, "Single-crystal silicon photonic-crystal fiber-tip pressure sensors," Journal of Microelectromechanical Systems, Vol. 24, No. 4, 968-975, 2015.
doi:10.1109/JMEMS.2014.2360859

2. Jan, C., W. Jo, M. J. F. Digonnet, and O. Solgaard, "Photonic-crystal-based fiber hydrophone with sub-100μPa/√Hz pressure resolution," IEEE Photonics Technology Letters, Vol. 28, No. 2, 123, 2016.
doi:10.1109/LPT.2015.2487498

3. Li, C., J. Xiao, T. Guo, S. Fan, and W. Jin, "Interference characteristics in a Fabry-Perot cavity with graphene membrane for optical fiber pressure sensors," Microsystem Technologies, Vol. 21, No. 11, 2297-2306, 2015.
doi:10.1007/s00542-014-2333-2

4. Cheng, L., C. Wang, Y. Huang, H. Liang, and B. O. Guan, "Silk fibroin diaphragm-based fiber-tip Fabry-Perot pressure sensor," Optics Express, Vol. 24, No. 17, 19600-19606, 2016.
doi:10.1364/OE.24.019600

5. Kou, J.-L., J. Feng, L. Ye, F. Xu, and Y.-Q. Lu, "Miniaturized fiber taper reflective interferometer for high temperature measurement," Opt. Express, Vol. 18, No. 13, 14245-14250, 2010.
doi:10.1364/OE.18.014245

6. Ge, Y., J. Zhou, and T. Wang, "A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching," Proc. SPIE 8199, 2011 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 81991L, November 22, 2011.

7. Wang, W., N. Wu, Y. Tian, X. Wang, C. Niezrecki, and J. Chen, "Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber," Opt. Express, Vol. 17, No. 19, 16613-16618, 2009.
doi:10.1364/OE.17.016613

8. Liao, C., S. Liu, L. Xu, C. Wang, Y. Wang, Z. Li, Q. Wang, and D. N. Wang, "Sub-micron silica diaphragm based fiber-tip Fabry-Perot interferometer for pressure measurement," Optics Letters, Vol. 39, No. 10, 2827-2830, 2014.
doi:10.1364/OL.39.002827

9. Watkins, A., J. Ward, and Y. Wu, S. N. Chormaic, "Single-input spherical microbubble resonator," Optics Letters, Vol. 36, No. 11, 2113-2115, 2011.
doi:10.1364/OL.36.002113

10. Yang, Y., S. Saurabh, J. M. Ward, and S. le Nic Chormaic, "High-Q, ultrathin-walled microbubble resonator for aerostatic pressure sensing," Optics Express, Vol. 24, No. 1, 294-299, 2016.
doi:10.1364/OE.24.000294

11. Henze, R., T. Seifert, J. Ward, and O. Benson, "Tuning whispering gallery modes using internal aerostatic pressure," Optics Letters, Vol. 36, No. 23, 4536-4538, 2011.
doi:10.1364/OL.36.004536

12. Jiang, Y., "Fourier transform white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometric sensors," IEEE Photon. Tech. Lett., Vol. 30, No. 2, 75-77, 2008.
doi:10.1109/LPT.2007.912567


© Copyright 2010 EMW Publishing. All Rights Reserved