A concept of moving dielectrophoresis electrodes (MDEP) based on Microelectromechanical Systems (MEMS) actuators is introduced in this letter. An example design of tuneable dielectrophoresis filter is presented. Finite Element Analysis of the electrostatic field of the tuneable filter has been conducted. Results show that the trapping force can be adjusted by actuating the MEMS actuators.
2. Masuda, S., et al., "Separation of small particles suspended in liquid by non-uniform travelling field," IEEE Trans. Ind. Appl., Vol. 23, 474-480, 1987.
3. Manaresi, N., et al., "A CMOS chip for individual cell manipulation and detection," IEEE J. Solid-state Circuits, Vol. 38, 2297-2305, 2003.
4. Chiou, P., A. Ohta, and M. C. Wu, "Massively parallel manipulation of single cells and microparticles using optical images," Nature, Vol. 436, 370-372, 2005.
5. Li, H., Y. Zheng, D. Akin, and R. Bashir, "Characterization and modelling of a microfluidic dielectrophoresis filter for biological species," Journal of Microelectromechanical Systems, Vol. 14, No. 1, 103-112, Feb. 2005.
6. Sameoto, D., T. Hubbard, and M. Kujath, "Operation of electrothermal and electrostatic MUMPs microactuators underwater," Journal of Micromechanics and Microengineering, Vol. 14, 1359-1366, 2004.
7. Gadish, N., J. Voldman, and , "High-throughput positivedielectrophoretic bioparticle microconcentrator," Analytical Chemistry, Vol. 78, No. 22, 7870-7876, 2006.
8. Jones, T. B., Electromechanics of Particles, Cambridge University Press, Cambridge, U.K., 1995.
9. CoventorWare, Coventor Inc., http://www.coventor.com/.