2007-12-10
Electron Subband Structure and Mobility Trends in P-n Delta-Doped Quantum Wells in Si
By
Progress In Electromagnetics Research Letters, Vol. 1, 159-165, 2008
Abstract
We present the electronic spectrum of a n-type deltadoped quantum well in Si coupled to a p-type delta-doped barrier within the envelope function effective mass approximation. We applied the Thomas-Fermi approximation to derive an analytical expression for the confining potential, and thus, we obtain the electronic structure in a simple manner. We analyzed the electron subband structure varying the distance between the doping planes (l) as well as the impurity density in them (n2D, p2D). We also study the mobility trends through an empirical formula that is based on the electron levels, the electron wave functions and the Fermi level. We find a monotonic decrease in the mobility as the p-type barrier moves away from the n-type well, and optimum parameters, l = 70A and n2D = 5 × 1012 cm-2 and p2D = 5×1013 cm-2, for maximum mobility.
Citation
Augusto Ariza-Flores, and Isaac Rodríguez-Vargas, "Electron Subband Structure and Mobility Trends in P-n Delta-Doped Quantum Wells in Si," Progress In Electromagnetics Research Letters, Vol. 1, 159-165, 2008.
doi:10.2528/PIERL07120607
References

1. Huang, D.-H., W.-C. Hsu, Y.-S. Lin, J.-H. Yeh, and J.-C. Huang, "A metamorphic heterostructure field-effect transistor with a double delta-doped channel," Semicond. Sci. Technol., Vol. 22, No. 7, 784-787, 2007.
doi:10.1088/0268-1242/22/7/018        Google Scholar

2. Lee, C.-S., C.-H. Chen, J.-C. Huang, and K.-H. Su, "Comparative studies on double δ-doped Al0.3Ga0.7As/InxGa1xAs/GaAs symmetrically graded doped-channel field-effect transistors," J. Electrochem. Soc., Vol. 154, No. 5, H374–H379, 2007.        Google Scholar

3. Chu, L.-H., H.-T. Hsu, E.-Y. Chang, T.-L. Lee, S.-H. Chen, Y.-C. Lien, and C.-Y. Chang, "Double δ-doped enhancement-mode InGaP/AlGaAs/InGaAs pseudomorphic high electron mobility transistor for linearity application," Jpn. J. Appl. Phys., Vol. 45, No. 35, L932-L934, 2006.
doi:10.1143/JJAP.45.L932        Google Scholar

4. Lee, C.-Y., H.-P. Shiao, K.-C. Kuo, H.-Y. Wu, and W.-H. Lin, "Mobility and charge density tuning in double δ-doped pseudomorphic high-electron-mobility transistors grown by metal organic chemical vapor deposition," J. Vac. Sci. Technol. B, Vol. 24, No. 6, 2597-2600, 2006.
doi:10.1116/1.2362783        Google Scholar

5. Lin, Y.-S., D.-H. Huang, W.-C. Hsu, T. B. Wang, K. H. Su, J.-C. Huang, and C. H. Ho, "Improved InAlGaP-based heterostructure field-effect transistors," Semicond. Sci. Technol., Vol. 21, No. 4, 540-543, 2006.
doi:10.1088/0268-1242/21/4/021        Google Scholar

6. Kalna, K., Q. Wang, M. Passlack, and A. Asenov, "Monte Carlo simulations of δ-doping placement in sub-100nm implant free InGaAs MOSFETs," Mater. Sci. Eng. B, Vol. 135, No. 3, 285-288, 2006.
doi:10.1016/j.mseb.2006.08.019        Google Scholar

7. Saidi, I., L. Bouzaiene, M. H. Gazzah, H. Mejri, and H. Maaref, "Back doping design in delta-doped AlGaN/GaN heterostructure field-effect transistors," Solid State Commun., Vol. 140, No. 6, 308-312, 2006.
doi:10.1016/j.ssc.2006.08.026        Google Scholar

8. Gossmann, H.-J. and F. C. Unterwald, "Dopant electrical activity and majority-carrier mobility in B- and Sb-δ-doped Si thin films," Phys. Rev. B, Vol. 47, No. 19, 12618-12624, 1993.
doi:10.1103/PhysRevB.47.12618        Google Scholar

9. Zudov, M. A., C. L. Yang, R. R. Du, T.-C. Shen, J.-Y. Ji, J. S. Kline, and J. R. Tucker, "Weak localization in ultradense 2D electron gas in δ-doped silicon," Cond-mat/0305482, (unpublished).        Google Scholar

10. Goh, K. E. J., L. Oberbeck, M. Y. Simmons, A. R. Hamilton, and M. J. Butcher, "Influence of doping density on electronic transport in degenerate Si: P δ-doped layers," Phys. Rev. B, Vol. 73, No. 3, 035401, 2006.        Google Scholar

11. Ando, T., A. B. Fowler, and F. Stern, "Electronic properties of two-dimensional systems," Rev. Mod. Phys., Vol. 54, No. 2, 437-672, 1982.
doi:10.1103/RevModPhys.54.437        Google Scholar

12. Rodriguez-Vargas, I. and L. M. Gaggero-Sager, "Subband and transport calculations in double n-type δ-doped quantum wells in Si," J. Appl. Phys., Vol. 99, No. 3, 033702, 2006.        Google Scholar

13. Gurtovoi, V. L., V. V. Valyaev, S. Yu Shapoval, and A. N. Pustovit, "Electron transport properties of double deltadoped GaAs structures grown by low-pressure metalorganic chemical vapor deposition," Appl. Phys. Lett., Vol. 72, No. 10, 1202-1204, 1998.
doi:10.1063/1.121013        Google Scholar

14. Rodriguez-Vargas, I., L. M. Gaggero-Sager, and V. R. Velasco, "Thomas-Fermi-Dirac theory of the hole gas of a double p-type δ-doped GaAs quantum wells," Surf. Sci., Vol. 537, No. 1, 75-83, 2003.
doi:10.1016/S0039-6028(03)00546-6        Google Scholar