volume | PIER Journals

Abstract

Design, simulation, and implementation of low profile microstrip spiral inductors for high power Industrial, Scientific and Medical (ISM) applications at the high frequency (HF-3-30 MHz) range are given for the first time. An accurate analytical model and algorithm have been developed to determine the simplified lumped element equivalent model parameters for spiral inductor and its physical dimensions. Five different spiral inductors are then simulated with a planar electromagnetic simulator using the physical dimensions obtained for the desired inductance values with the analytical method. The implementation method and substrate selection for spiral inductors at the HF range are given in detail for high power applications. The spiral inductors are then constructed on 100 mil Alumina substrate and measured with network analyzer. It is found that analytical, simulation and measurement results are in close agreement and the analytical method and algorithm that have been developed can be used to accurately determine the physical dimensions, and the resonant frequency of the spiral inductor for the desired inductance value.

1. Long, J. R. and M. A. Copeland, "The modeling, characterization, and design of monolithic inductors for silicon RF IC's," IEEE J. of Solid-State Circuits, Vol. 32, 357-369, 1997.
doi:10.1109/4.557634 Google Scholar

2. Niknejad, A. M. and R. G. Meyer, "Analysis, design, and optimization of spiral inductors and transformers for Si RF IC's," IEEE J. of Solid-State Circuits, Vol. 33, 1470-1481, 1998.
doi:10.1109/4.720393 Google Scholar

3. Reyes, A. C., S. M. El-Ghazaly, S. J. Dorn, M. Dydyk, D. K. Schroder, and H. Patterson, "Coplanar waveguides and microwave inductors on silicon substrates," IEEE Trans. on Microwave Theory and Tech., Vol. 43, 2016-2022, 1995.
doi:10.1109/22.414534 Google Scholar

4. Ashby, K. B., I. C. Koullias, W. C. Finley, J. J. Bastek, and S. Moinian, "High Q inductors for wireless applications in a complementary silicon bipolar process," IEEE J. of Solid-State Circuits, Vol. 31, 4-9, 1996.
doi:10.1109/4.485838 Google Scholar

5. Lu, L.-H., G. E. Ponchak, P. Bhattacharya, and L. P. B. Katehi, "High-Q X-band and K‘-band micromachined spiral inductors for use in Si-based integrated circuits," Proc. Silicon Monolithic Integrated Circuits RF Syst., 108-112, 2000. Google Scholar

6. Bahl, I. J., "Improved quality factor spiral inductor on GaAs substrates," IEEE Microwave Guided Wave Lett., Vol. 9, 398-400, 1999.
doi:10.1109/75.798028 Google Scholar

7. Ribas, R. P., J. Lescot, J. L. Leclercq, N. Bernnouri, J. M. Karam, and B. Courtois, "Micromachined planar spiral inductor in standard GaAs HEMT MMIC technology," IEEE Electron Device Lett., Vol. 19, 285-287, 1998.
doi:10.1109/55.704401 Google Scholar

8. Takenaka, H. and D. Ueda, "0.15 μm T-shaped gate fabrication for GaAs MODFET using phase shift lithography," IEEE Trans. on Electron Devices, Vol. 43, 238-244, 1996.
doi:10.1109/16.481723 Google Scholar

9. Chiou, M. H. and K. Y. J. Hsu, "A new wideband modeling technique for spiral inductors," IET Microwave, Antennas, and Propagation, Vol. 151, 115-120, 2006.
doi:10.1049/ip-map:20040169 Google Scholar

10. Lu, H.-C., T. B. Chan, C. C.-P. Chen, and C.-M. Liu, "LTCC spiral inductor synthesis and optimization with measurement verification," IEEE Trans. on Advanced Packaging, Vol. 33, 2010.
doi:10.1109/TADVP.2009.2025263 Google Scholar

11. Talwalkar, N. A., C. P. Yue, and S. S. Wong, "Analysis and synthesis of on-chip spiral inductors," IEEE Trans. on Electron Devices, Vol. 52, 176-182, 2005.
doi:10.1109/TED.2004.842535 Google Scholar

12. Mukherjee, S., B. Mutnury, S. Dalmia, and M. Swaminathan, "Layout-level synthesis of RF inductors and filters in LCP substrate for Wi-Fi applications," IEEE Trans. on Microwave Theory and Tech., Vol. 53, 2196-2210, 2005.
doi:10.1109/TMTT.2005.848782 Google Scholar

13. Kulkarni, J. P., C. Augustine, B. Jung, and K. Roy, "Nano spiral inductors for low-power digital spintronic circuits," IEEE Trans. on Magnetics, Vol. 46, 1898-1901, 2010.
doi:10.1109/TMAG.2010.2046020 Google Scholar

14. Greenhouse, H. M., "Design of planar rectangular microelectronic inductors," IEEE Transactions on Parts, Hybrids and Packaging, Vol. 10, 101-109, 1974.
doi:10.1109/TPHP.1974.1134841 Google Scholar

15. Jenei, S., B. K. J. C. Nauwelaers, and S. Decoutere, "Physics-based closed-form inductance expression for compact modeling of integrated spiral inductors," IEEE J. of Solid-State Circuits, Vol. 37, 77-80, 2002.
doi:10.1109/4.974547 Google Scholar

16. Asgaran, S., "New accurate physics-based closed-form expressions for compact modeling and design of on-chip spiral inductors," Proc. 14th Int. Conf. Microelectronics, 247-250, 2002.
doi:10.1109/ICM-02.2002.1161540 Google Scholar

17. Mohan, S. S., M. M. Hershenson, S. P. Boyd, and T. H. Lee, "Simple accurate expressions for planar spiral inductance," IEEE J. of Solid-State Circuits, Vol. 34, 1419-1424, 1999.
doi:10.1109/4.792620 Google Scholar

18. Chen, C. C., J. K. Huang, and Y. T. Cheng, "A closed-form integral model of spiral inductor using the Kramers-Kronig relations," IEEE Microwave AMD Wireless Comp. Letters, Vol. 15, 2005. Google Scholar

19. Sieiro, J., J. M. Lopez-Villegas, J. Cabanillas, J. A. Osorio, and J. Samitier, "A physical frequency-dependent compact model for RF integrated inductors," IEEE Trans. on Microwave Theory and Tech., Vol. 50, 384-392, 2002.
doi:10.1109/22.981290 Google Scholar

20. Sun, H., Z. Liu, J. Zhao, L. Wang, and J. Zhu, "The enhancement of Q-factor of planar spiral inductor with low-temperature annealing," IEEE Trans. on Electron Devices, Vol. 55, 931-936, 2008.
doi:10.1109/TED.2007.915091 Google Scholar

21. Tsai, H. S., J. Lin, R. C. Frye, K. L. Tai, M. Y. Lau, D. Kossives, F. Hrycenko, and Y. K. Chen, "Investigation of current crowding effect on spiral inductors," IEEE MTT-S Symp. on Technologies to Wireless Applications, 139-142, 1997.
doi:10.1109/MTTTWA.1997.595129 Google Scholar

22. Bushyager, N., M. Davis, E. Dalton, J. Laskar, and M. Tentzeris, "Q-factor and optimization of multilayer inductors for RF packaging microsystems using time domain techniques," Electronic Components and Technology Conference, 1718-1721, 2002. Google Scholar

23. Eroglu, A. and J. K. Lee, "The complete design of microstrip directional couplers using the synthesis technique," IEEE Transactions on Instrumentation and Measurement, Vol. 12, 2756-2761, 2008.
doi:10.1109/TIM.2008.926391 Google Scholar

24. Costa, E. M. M., "Parasitic capacitances on planar coil," Journal of Electromagnetic Waves and Applications, Vol. 23, No. 17--18, 2339-2350, 2009.
doi:10.1163/156939309790416198 Google Scholar

25. Aluminum Oxide Material Properties: http://accuratus.com/alumox.html..

Prof. Abdullah Eroglu