In this paper, two different kinds of near-field measurement techniques are presented. The first one uses coaxial probes that do not give precise measurements on microelectronic devices. We saw in  that the spatial resolution of these probes reach 500 μm for monopole and is millimetric for dipole probe. The second one is based on the Pockels effect that converts an electromagnetic (EM) field into optical modulation. Our objective is to improve the Ex/Ey near-field measurement with this second technique. The performance of the electro-optic (EO) probe is compared with dipole probes of 2.5 and 5 mm with the use of simulations and measurements, on a wire above a ground plane and on coupled microstrip lines. At the end, a discussion about the technical limitations of the EO probe is made.
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