volume | PIER Journals

Abstract

A new deembedding method in permittivity measurement of ferroelectric thin film material is proposed in this paper. By measuring the two scattering matrixes of the two samples with different length, the propagation constant of the actual network under test (ANUT) can be obtained. Further more, the permittivity would be extracted. The results show that though the proposed deembedding method, the error induced by embedding can be eliminated successfully and the propagation constant of the ANUT can be extracted accurately.

1. Wu, C.-J., C.-M. Fu, W.-K. Kuo, and T.-J. Yang, "Microwave surface impedance of a nearly ferroelectric superconductor," Progress In Electromagnetics Research, Vol. 73, 39-47, 2007.
doi:10.2528/PIER07030502 Google Scholar

2. Lee, Y. C., "CPW-to-stripline vertical via transitions for 60 GHz LTCC SOP applications," Progress In Electromagnetics Research Letters, Vol. 2, 37-44, 2008. Google Scholar

3. Eldek, A. A., "Wideband 180◦ phase shifter using microstrip-CPW-icrostrip transition," Progress In Electromagnetics Research B, Vol. 2, 177-187, 2008.
doi:10.2528/PIERB07111507 Google Scholar

4. Subruamanyam, G., F. V. Keuls, and F. A. Miranda, "A K-band tunable microstrip bandpass filter using a thin film conductor/ferroelectric/dielectric multilayer configurations," IEEE Micro. Guided Wave Lett., Vol. 8, No. 3, 78-80, Feb. 1998.
doi:10.1109/75.658647 Google Scholar

5. Acikel, B., T. R. Taylor, P. J. Hansen, J. S. Speck, and R. A. York, "A new high performance phase shifter using BaSrTiO₃thin films," IEEE Microw. Wireless Compon. Lett., Vol. 12, No. 7, 237-239, Jul. 2002.
doi:10.1109/LMWC.2002.801129 Google Scholar

6. Gevorgian, S. S., E. F. Carlsson, S. Runder, U. Helmersson, E. L. Kollberg, E. Wikborg, and O. G. Vendik, "HTS/ferroelectric devices for microwave applications," IEEE Trans. Appl. Supercond., Vol. 7, No. 2, 2458-2461, Jun. 1997.
doi:10.1109/77.621737 Google Scholar

7. Wu, Y. Q., Z. X. Tang, B. Zhang, and Y. H. Xu, "Permeability measurement of magnetic materials in microwave frequency range using support vector machine regression ," Progress In Electromagnetics Research, Vol. 70, 247-256, 2007.
doi:10.2528/PIER07012801 Google Scholar

8. Chung, B.-K., "Dielectric constant measurement for thin material at microwave frequencies," Progress In Electromagnetics Research, Vol. 75, 239-252, 2007.
doi:10.2528/PIER07052801 Google Scholar

9. Huang, R and D. M. Zhang, "Application of mode matching method to analysis of axisymmetric coaxial discontinuity structures used in permeability and/or permittivity measurement," Progress In Electromagnetics Research, Vol. 67, 205-230, 2007.
doi:10.2528/PIER06083103 Google Scholar

10. Kumar, A. and G. Singh, "Measurement of dielectric constant and loss factor of the dielectric material at microwave frequencies," Progress In Electromagnetics Research, Vol. 69, 47-54, 2007.
doi:10.2528/PIER06111204 Google Scholar

11. Tian, B.-N., D.-S. Yang, J.-M. Tang, and Q.-Z. Liu, "Analysis of transmission/reflection method for measuring electromagnetic parameters of materials," Chinese Journal of Radio Science, Vol. 16, No. 1, Mar. 2001. Google Scholar

Dr. Xi He

Dr. Zong-Xi Tang

Dr. Biao Zhang

Dr. Yunqiu Wu