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PIER PIER B PIER C PIER M PIER Letters PIER Photonics
2008-02-05
A New Deembedding Method in Permittivity Measurement of Ferroelectric Thin Film Material
By
Xi He,

    Dr. Xi He

    School of Electronic Engineering

    University of Electronic Science and Technology of China

    China

    Homepage

Zong-Xi Tang,

    Dr. Zong-Xi Tang

    University of Electronic Science and Technology of China

    China

    Homepage

Biao Zhang,

    Dr. Biao Zhang

    University of Electronic Science and Technology of China

    China

    Homepage

Yunqiu Wu

    Dr. Yunqiu Wu

    University of Electronic Science and Technology of China

    China

    Homepage

Progress In Electromagnetics Research Letters, Vol. 3, 1-8, 2008
doi:10.2528/PIERL08011501 | Google Scholar

Abstract
A new deembedding method in permittivity measurement of ferroelectric thin film material is proposed in this paper. By measuring the two scattering matrixes of the two samples with different length, the propagation constant of the actual network under test (ANUT) can be obtained. Further more, the permittivity would be extracted. The results show that though the proposed deembedding method, the error induced by embedding can be eliminated successfully and the propagation constant of the ANUT can be extracted accurately.
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Citation
Xi He, Zong-Xi Tang, Biao Zhang, and Yunqiu Wu, "A New Deembedding Method in Permittivity Measurement of Ferroelectric Thin Film Material," Progress In Electromagnetics Research Letters, Vol. 3, 1-8, 2008.
doi:10.2528/PIERL08011501
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