1. Bugg, C. D. and P. J. King, "Scanning capacitance microscopy," J. Phys. E: Sci. Instrum., Vol. 21, 147-151, 1988.
doi:10.1088/0022-3735/21/2/003 Google Scholar
2. Williams, C. C., W. P. Hough, and S. A. Rishton, "Scanning capacitance microscopy on a 25nm scale," Appl. Phys. Lett., Vol. 55, 203-205, 1989.
doi:10.1063/1.102096 Google Scholar
3. Gomez-Monivas, S., J. J. Saenza, R. Carminati, and J. J. Greffet, "Theory of electrostatic probe microscopy: A simple perturbative approach," Appl. Phys. Lett., Vol. 76, 2955-2975, 2000.
doi:10.1063/1.126528 Google Scholar
4. Jaensch, S., H. Scmidt, and M. Grundmann, "Quantitative scanning capacitance microscopy," Physica B, Vol. 376-377, 913-915, 2006.
doi:10.1016/j.physb.2005.12.227 Google Scholar
5. Garca-Valenzuela, A., N. C. Bruce, and D. Kouznetsov, "An investigation into the applicability of perturbation techniques to solve integral equations for a parallel-plate capacitor with a rough electrode ," J. Phys. D: Appl. Phys., Vol. 31, 240-251, 1998.
doi:10.1088/0022-3727/31/2/011 Google Scholar
6. Bruce, N. C., A. Garca-Valenzuela, and D. Kouznetsov, "Perturbation theory for surface-profile imaging with a capacitive probe," Appl. Phys. Lett., Vol. 77, 2066-2068, 2000.
doi:10.1063/1.1312852 Google Scholar
7. Bruce, N. C., A. Garca-Valenzuela, and D. Kouznetsov, "The lateral resolution for imaging periodic conducting surfaces in capacitive microscopy," J. Phys. D: Appl. Phys., Vol. 33, 2890-2898, 2000.
doi:10.1088/0022-3727/33/22/305 Google Scholar
8. Setala, T., M. Kaivola, and A. T. Friberg, "Evanescent and propagation electromagnetic fields in scattering from point-dipole structures," J. Opt. Soc. Am. A, Vol. 18, 678-688, 2001.
doi:10.1364/JOSAA.18.000678 Google Scholar
9. Beladi, S., P. Girard, and G. Leveque, "Electrostatic forces acting on the tip in atomic force microscopy: Modelization and comparison with analytic expressions," J. Appl. Phys., Vol. 81, 1023-1030, 1997.
doi:10.1063/1.363884 Google Scholar
10. Bruce, N. C., A. Garca-Valenzuela, and D. Kouznetsov, "Rough-surface capacitor: Approximations of the capacitance with elementary functions," J. Phys. D: Appl. Phys., Vol. 32, 2692-2702, 1999.
doi:10.1088/0022-3727/32/20/317 Google Scholar
11. Bruce, N. C. and A. Garca-Valenzuela, "Capacitance measurement of Gaussian random rough surfaces with planar and corrugated electrodes," Meas. Sci. Technol., Vol. 16, 669-676, 2005.
doi:10.1088/0957-0233/16/3/007 Google Scholar
12. Marchiando, J. F. and J. J. Kopanski, "Regression procedure for determining the dopant profile in semiconductors from scanning capacitance microscopy data," J. Appl. Phys., Vol. 92, 5798, 2002.
doi:10.1063/1.1512686 Google Scholar
13. Giannazzo, F., D. Goghero, V. Raineri, S. Mirabella, and F. Priolo, "Scanning capacitance microscopy on ultranarrow doping profiles in Si," Appl. Phys. Lett., Vol. 83, 2659, 2003.
doi:10.1063/1.1613032 Google Scholar
14. Giannazzo, F., D. Goghero, and V. Raineri, "Experimental aspects and modeling for quantitative measurements in scanning capacitance microscopy ," J. Vac. Sci. Technol. B, Vol. 22, 2391, 2004.
doi:10.1116/1.1795252 Google Scholar
15. Banasiak, R., R. Wajman, D. Sankowski, and M. Soleimani, "Three-dimensional nonlinear inversion of electrical capacitance tomography data using a complete sensor model ," Progress In Electromagnetic Research, Vol. 100, 219-234, 2010.
doi:10.2528/PIER09111201 Google Scholar
16. Wang, C.-F., L.-W. Li, P.-S. Kooi, and M.-S. Leong, "Efficient capacitance computation for three-dimensional structures based on adaptive integral method," Progress In Electromagnetic Research, Vol. 30, 33-46, 2001.
doi:10.2528/PIER00031302 Google Scholar
17. Goharian, M., M. Soleimani, and G. Moran, "A trust region subproblem for 3D electrical impedance tomography inverse problem using experimental data," Progress In Electromagnetic Research, Vol. 94, 19-32, 2009.
doi:10.2528/PIER09052003 Google Scholar
18. Soleimani, M., C. N. Mitchell, R. Banasiak, R. Wajman, and A. Adler, "Four-dimensional electrical capacitance tomography imaging using experimental data ," Progress In Electromagnetic Research, Vol. 90, 171-182, 2009.
doi:10.2528/PIER09010202 Google Scholar
19. Press, W. H., S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in Fortran 77, 2nd Ed., Cambridge University Press, New York 2003.
20. Mendoza-Suarez, A. and E. R. Mendez, "Light scattering by a reentrant fractal surface," Appl. Opt., Vol. 36, 3521-3531, 1997.
doi:10.1364/AO.36.003521 Google Scholar
21. Mendoza-Suarez, A., U. Ruz-Corona, and R. Espinosa-Luna, "E®ects of wall random roughness on TE and TM modes in a hollow conducting waveguide," Opt. Comm., Vol. 238, 291-299, 2004.
doi:10.1016/j.optcom.2004.05.007 Google Scholar