Vol. 39
Latest Volume
All Volumes
PIERB 105 [2024] PIERB 104 [2024] PIERB 103 [2023] PIERB 102 [2023] PIERB 101 [2023] PIERB 100 [2023] PIERB 99 [2023] PIERB 98 [2023] PIERB 97 [2022] PIERB 96 [2022] PIERB 95 [2022] PIERB 94 [2021] PIERB 93 [2021] PIERB 92 [2021] PIERB 91 [2021] PIERB 90 [2021] PIERB 89 [2020] PIERB 88 [2020] PIERB 87 [2020] PIERB 86 [2020] PIERB 85 [2019] PIERB 84 [2019] PIERB 83 [2019] PIERB 82 [2018] PIERB 81 [2018] PIERB 80 [2018] PIERB 79 [2017] PIERB 78 [2017] PIERB 77 [2017] PIERB 76 [2017] PIERB 75 [2017] PIERB 74 [2017] PIERB 73 [2017] PIERB 72 [2017] PIERB 71 [2016] PIERB 70 [2016] PIERB 69 [2016] PIERB 68 [2016] PIERB 67 [2016] PIERB 66 [2016] PIERB 65 [2016] PIERB 64 [2015] PIERB 63 [2015] PIERB 62 [2015] PIERB 61 [2014] PIERB 60 [2014] PIERB 59 [2014] PIERB 58 [2014] PIERB 57 [2014] PIERB 56 [2013] PIERB 55 [2013] PIERB 54 [2013] PIERB 53 [2013] PIERB 52 [2013] PIERB 51 [2013] PIERB 50 [2013] PIERB 49 [2013] PIERB 48 [2013] PIERB 47 [2013] PIERB 46 [2013] PIERB 45 [2012] PIERB 44 [2012] PIERB 43 [2012] PIERB 42 [2012] PIERB 41 [2012] PIERB 40 [2012] PIERB 39 [2012] PIERB 38 [2012] PIERB 37 [2012] PIERB 36 [2012] PIERB 35 [2011] PIERB 34 [2011] PIERB 33 [2011] PIERB 32 [2011] PIERB 31 [2011] PIERB 30 [2011] PIERB 29 [2011] PIERB 28 [2011] PIERB 27 [2011] PIERB 26 [2010] PIERB 25 [2010] PIERB 24 [2010] PIERB 23 [2010] PIERB 22 [2010] PIERB 21 [2010] PIERB 20 [2010] PIERB 19 [2010] PIERB 18 [2009] PIERB 17 [2009] PIERB 16 [2009] PIERB 15 [2009] PIERB 14 [2009] PIERB 13 [2009] PIERB 12 [2009] PIERB 11 [2009] PIERB 10 [2008] PIERB 9 [2008] PIERB 8 [2008] PIERB 7 [2008] PIERB 6 [2008] PIERB 5 [2008] PIERB 4 [2008] PIERB 3 [2008] PIERB 2 [2008] PIERB 1 [2008]
2012-03-24
Design and Fabrication of RF-MEMS Switch for V-Band Reconfigurable Application
By
Progress In Electromagnetics Research B, Vol. 39, 301-318, 2012
Abstract
This paper presents a study of RF MEMS switch designed to be integrated in tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, we go into detail of each procedure to present a complete study from design to fabrication and characterization of a RF-MEMS switch. The proposed concepts are validated by experimental results.
Citation
Thanh Mai Vu, Gaetan Prigent, Jinyu Ruan, and Robert Plana, "Design and Fabrication of RF-MEMS Switch for V-Band Reconfigurable Application," Progress In Electromagnetics Research B, Vol. 39, 301-318, 2012.
doi:10.2528/PIERB12021404
References

1. Brown, R. and G. M. Rebeiz, "A varactor tuned RF filter," IEEE Transactions on Microwave Theory and Techniques, Vol. 48, 1157-1160, July 2000.
doi:10.1109/22.848501

2. Tanne, G., E. Rius, F. Mahe, S. Toutain, F. Biron, L. Billonnet, B. Jarry, and P. Guillon, "Improvement in losses and size of frequency tunable coplanar filter structures using MMIC negative resistance chips for multistandard mobile communication systems," IEEE MTT-S Int. Microwave Symp. Dig., 1165-1168, Boston, MA, 2000.

3. Hong, J. S., "Reconfigurable planar filters," IEEE Transactions on Microwave Theory and Techniques, Vol. 10, No. 6, 73-83, October 2009.

4. Nath, A. J., D. Ghosh, W. Fathelbab, J. P. Maria, A. I. Kingon, P. D. Franzon, and M. B. Steer, "A tunable combline bandpass filter using barium strontium titanate interdigital varactors on an alumina substrate ," IEEE MTT-S Int. Microwave Symp. Dig., 595-598, June 2005.
doi:10.1109/MWSYM.2005.1516670

5. Bernigaud, J. F., N. Martin, P. Laurent, C. Quendo, G. Tanne, B. Della, F. Huret, and P. Gelin, "Liquid crystal tunable filter based on DBR topology," 36th European Microwave Conference, 368-371, September 2006.

6. Tsutsumi, M. and T. Fukusako, "Magnetically tunable superconducting microstrip resonators using yttrium iron garnet single crystals," IEEE MTT-S Int. Microwave Symp. Dig., Vol. 3, 1491-1494, June 1997.

7. Rebeiz, G. M. and J. B. Muldavin, "RF MEMS switches and switch circuits," IEEE Microwave Mag., 59-71, December 2001.
doi:10.1109/6668.969936

8. Dussopt, L. and G. M. Rebeiz, "High-Q millimeter-wave MEMS varactors: Extended-tuning range and discrete-position designs," IEEE Microwave Theory and Technique Symposium, 1205-1208, Phoenix, 2002.

9. Vu, T. M., G. Prigent, and R. Plana, "MEMs based reconfigurable dual behavior resonator using BCB technology in W-frequency range," IEEE International Newcas Taisa Joint Conference, July 2009.

10. Prigent, G., T. M. Vu and R. Plana, "Synthesis for tunable dual behavior resonator," IEEE Asia Pacific Microwave Conference, 123-126, December 2009.
doi:10.1109/APMC.2009.5385338

11. Grenier, K., D. Dubuc, L. Mazenq, J. P. Busquere, B. Ducarouge, F. Bouchriha, A. Rennane, V. Lubecke, P. Pons, P. Ancey, and R. Plana, "Polymer based technologies for microwave and millimeterwave applications," IEEE International Electron Devices Meeting, 545-548, December 2004.

12. Vu, T. M., G. Prigent, J. Ruan, A. Rumeau, P. Pons, and R. Plana, "Fabrication and characterization of RF-MEMS switch in V-band," IEEE Asia Pacific Microwave Conference, 202-205, December 2009.
doi:10.1109/APMC.2009.5385326

13. Rebeiz, G. M., RF MEMS Theory, Design, and Technology, J. Wiley & Sons, Hoboken, New Jersey, 2003.

14. Mihailovich, R. E., M. Kim, J. B. Hacker, E. A. Sovero, J. Studer, J. A. Higgins, and J. F. DeNatale, "MEM relay for reconfigurable RF circuits," IEEE Microwave and Wireless Components Letters, Vol. 11, No. 2, 53-55, February 2001.
doi:10.1109/7260.914300

15. Zacvracky, P. M., N. E. McGruer, R. H. Morrison, and D. Potter, "Microswitches and microrelays with a view toward microwave applications ," Int. J. RF Microwave CAE, Vol. 9, No. 4, 338-347, 1999.
doi:10.1002/(SICI)1099-047X(199907)9:4<338::AID-MMCE5>3.0.CO;2-Q

16. Prigent, G., E. Rius, F. Le Pennec, S. Le Maguer, C. Quendo, G. Six, and H. Happy , "Design of narrow-band DBR planar filters in Si-BCB technology for millimeter-wave applications," IEEE Transactions on Microwave Theory and Techniques, Vol. 52, No. 3, 1045-1051, March 2004.
doi:10.1109/TMTT.2004.823581

17. Six, G., G. Prigent, E. Rius, G. Dambrine, and H. Happy, "Fabrication and characterization of low-loss TFMS on silicon substrate up to 220 GHz," IEEE Transactions on Microwave Theory and Techniques, Vol. 53, No. 1, 301-305, January 2005.
doi:10.1109/TMTT.2004.839915

18. Villeneuve, C., S. Aouba, M. Dilhan, D. Bourrier, P. Pons, and R. Plana, "Low stressed gradient in gold micromachined cantilevers," 20th Micromechanics Europe Workshop, September 20 - 22, 2009.

19. Chang, H.-Y., J.-H. Tsai, T.-W. Huang, H. Wang, Y. X. Xia, and Y. H. Shu, "A W-band high-power predistorted directconversion digital modulator for transmitter applications," IEEE Microwave and Wireless Components Letters, Vol. 15, No. 9, 600-602, September 2005.
doi:10.1109/LMWC.2005.855382