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PIER PIER B PIER C PIER M PIER Letters PIER Photonics
2016-12-08
Electrodeless Measurement Technique of Complex Dielectric Permittivity of High-k Dielectric Films in the Millimeter Wavelength Range
By
Igor V. Kotelnikov,

    Dr. Igor V. Kotelnikov

    Saint Petersburg Electrotechnical University ``LETI''

    Russian Federation

    Homepage

Andrey Altynnikov,

    Dr. Andrey Altynnikov

    Physical Electronics and Technology

    Saint Petersburg Electrotechnical University ``LETI''

    Russian Federation

    Homepage

Anatoly Konstantinovich Mikhailov,

    Dr. Anatoly Konstantinovich Mikhailov

    FET Department

    Saint-Petersburg State Electrotechnical University (LETI)

    Russia

    Homepage

Valentina V. Medvedeva,

    Dr. Valentina V. Medvedeva

    Saint Petersburg Electrotechnical University ``LETI''

    Russian Federation

    Homepage

Andrey B. Kozyrev

    Dr. Andrey B. Kozyrev

    Saint-Petersburg Electrotechnical University

    Russia

    Homepage

Progress In Electromagnetics Research M, Vol. 52, 161-167, 2016
doi:10.2528/PIERM16100505 | Google Scholar

Abstract
An electrodeless measurement technique of complex dielectric permittivity of high-K dielectric films is described. The technique is based on a quasi-optic Fabry-Perot resonator and modified for investigation of two-layer dielectric structures --- substrate/K-film. This procedure is destined to be used for providing a simple intermediate control of parameters of high-K films before the following technological process. Regimes of measurements providing the most sensitive conditions for definition of film parameters are considered. The proposed method is tested on two-layer structures with well-known parameters and is used for characterization of ferroelectric (Ba,Sr)TiO3 films in the millimeter wavelength range (~50 GHz).
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Citation
Igor V. Kotelnikov, Andrey Altynnikov, Anatoly Konstantinovich Mikhailov, Valentina V. Medvedeva, and Andrey B. Kozyrev, "Electrodeless Measurement Technique of Complex Dielectric Permittivity of High-k Dielectric Films in the Millimeter Wavelength Range," Progress In Electromagnetics Research M, Vol. 52, 161-167, 2016.
doi:10.2528/PIERM16100505
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