volume | PIER Journals

Abstract

In this paper, a surface micromachined microwave tunable low pass filter, consisting of tunable shunt capacitors and series inductors, has been realized. The filter exhibits insertion loss of less than 1 dB (up to 10 GHz), stop band attenuation of 20 dB at 20 GHz, and cut-off frequency is changed to 8 GHz with the application of DC actuation voltage in the structure. The filter has an overall dimension of 5.5 mm x 2 mm. The characteristics of tunable filter are investigated with and without packaging.

1. Shang , J. and M. J. Lancaster, Microwave Filters for RF Applications, Wiley, , 2000.

2. Rebeiz, G. M., "RF MEMS Theory, Design and Technology," Wiley-Interscience, New York, 2003. Google Scholar

3. Barker, N. S. and G. M. Rebeiz, "Distributed MEMS true-time delay phase shifters and wide band switches," IEEE Transactions on Microwave Theory and Techniques, Vol. 46, No. 11, Nov. 1998.
doi:10.1109/22.734503 Google Scholar

4. Brank, J., J. Yao, M. Eberly, A. Malczewski, K. Varian, and C. Goldsmith, "RF MEMS based tunable filters," International Journal of RF and Microwave Computer-Aided Engineering, Vol. 11, No. 5, 276-284, Sep. 2001.
doi:10.1002/mmce.1036 Google Scholar

5. Rebeiz, G. M., G. L. T. Tan, and J. S. Hayden, "RF MEMS phase shifters: Design and applications," IEEE Microwave Magazine, Vol. 3, 72-81, Jun. 2002.
doi:10.1109/MMW.2002.1004054 Google Scholar

6. Natarajan, K., B. Sriram, Y. Chandana, K. Chandrasekhar, H. B. Ganapathy, B. Dasan, K. S. Reddy, and S. Pamidighantam, "Overview of MEMS activities at BEL," Proceedings of the Fourth International Conference on Smart Materials, Structures and Systems, SE-109-116, Bangalore, India, Jul. 28-30, 2005. Google Scholar

7. Laha , R., B. Sriram, A. T. Kalghatki, K. Natarajan, and S. Pamidighantam, "Design, development and characterization of surface micromachined passive components for radar applications," Proceedings of International Radar Symposium (IRS), Bangalore, India, Dec. 2005. Google Scholar

8. Lee , S., J. Kim, J. Kim, Y. Kim, and Y. Kwon, "Millimeter-wave MEMS tunable low pass filter with reconfigurable series inductors and capacitive shunt switches," IEEE Microwave and Wireless Components Letters, Vol. 15, No. 10, 691-693, Oct. 2005.
doi:10.1109/LMWC.2005.856843 Google Scholar

9. McFeetors, G. and M. Okoniewski, "Distributed MEMS analog phase shifter with enhanced tuning," IEEE Microwave and Wireless Components Letters, Vol. 16, No. 1, 34-36, Jan. 2006.
doi:10.1109/LMWC.2005.861350 Google Scholar

10. Janardhana, V., R. G. Kulkarni, and J. S. Roy, "Feasibility study of MEMS distributed phase shifters for phased array," International Symposium on Microwaves, ISM, Dec. 2006. Google Scholar

11. Janardhana, V., J. S. Roy, S. Pamidighantam, and R. G. Kulkarni, "Analysis of surface micro machined RF MEMS phase shifters," IEEE Aerospace & Electronic Systems Magazine, Vol. 23, No. 5, 32-35, May 2008.
doi:10.1109/MAES.2008.4523913 Google Scholar

12. Jahanbakht, M., M. Naser-Moghadasi, and A. A. Lotfi Neyestanak, "Low actuation voltage Ka-band fractal MEMS switch," Progress In Electromagnetics Research C, Vol. 5, 83-92, 2008. Google Scholar

13. Shim , Y., R. Tabrizian, F. Ayazi, and M. Rais-Zadeh, "Low-loss MEMS band-pass filters with improved out-of-band rejection by exploiting inductive parasitics," International Electron. Devices Meeting (IEDM09), 801-804, Baltimore, USA, Dec. 7-9, 2009. Google Scholar

14. Topalli , K., M. Unlu, H. I. Atasoy, S. Demir, O. Aydin Civi, and T. Akin, "Empirical formulation of bridge inductance in inductively tuned RF MEMS shunt switches," Progress In Electromagnetics Research, Vol. 97, 343-356, 2009.
doi:10.2528/PIER09092502 Google Scholar

15. Raedi, Y., S. Nikmehr, and A. Poorziad, "A novel bandwidth enhancement technique for X-band RF MEMS actuated reconfigurable reflectarray," Progress In Electromagnetics Research, Vol. 111, 179-196, 2011.
doi:10.2528/PIER10101201 Google Scholar

16. Gil, I., M. Morata, R. Fernandez-Garcia, X. Rottenberg, and W. De Raedt, "Recon¯gurable RF-MEMS metamaterials filters," PIERS Proceedings, 1239-1242, Marrakesh, Morocco, Mar. 20-23, 2011. Google Scholar

17. Pillans, B. W., A. Malczewski, F. J. Morris, and R. A. Newstrom, "A family of MEMS tunable filters for advanced RF applications," IEEE MTT-S International Symposium, Baltimore, USA, Jun. 5-10, 2011. Google Scholar

18. Glover, I. A., S. R. Pennock, and P. R. Shepherd, Microwave Devices, Circuits and Subsystems for Communications Engineering, John Wiley and Sons, 2005.
doi:10.1002/0470012757

Dr. Vittal Janardhana

Dr. Naga Sayanu Pamidighantam

Dr. Neela Chattoraj

Professor Jibendu Sekhar Roy

Mr. Srinivasa Kuppireddi

Dr. Raghavendra Govindra Kulkarni