1. Yu, P. Y. and M. Cardona, Fundamentals of Semiconductors. Physics and Materials Properties, Springer, New York, 2010.
doi:10.1007/978-3-642-00710-1
2. Schubert, E. F., A. Fische, and K. Ploog, "The delta-doped field-effect transistor (δFET)," IEEE Trans. Electron. Devices, Vol. 33, No. 5, 625-630, 1986.
doi:10.1109/T-ED.1986.22543
3. Ploog, K., "Delta- (δ-) doping in MBE-grown GaAs: Concept and device application," J. Cryst. Growth, Vol. 81, No. 4, 304-313, 1987.
doi:10.1016/0022-0248(87)90409-X
4. Schubert, E. F., "Delta doping of III-V compound semiconductors: Fundamentals and device applications," J. Vac. Sci. Technol., Vol. A8, No. 3, 2980-2996, 1990.
5. Nakagawa, K., A. A. van Gorkum, and Y. Shiraki, "Atomic layer doped field effect transistor fabricated using Si molecular beam epitaxy," Appl. Phys. Lett., Vol. 54, No. 19, 1869-1871, 1989.
doi:10.1063/1.101263
6. Word, C. E. C., G. Metze, J. Berry, and L. F. Eastman, "Complex free-carrier profile synthesis by `atomic plane' doping of MBE GaAs," J. Appl. Phys., Vol. 51, No. 1, 383-387, 1980.
doi:10.1063/1.327383
7. Nakazato, K., R. J. Blaikie, and H. Ahmed, "Single-electron memory," J. Appl. Phys., Vol. 75, No. 10, 5123-5136, 1994.
doi:10.1063/1.355758
8. Zrenner, A., F. Koch, and K. Ploog, "Subband physics for a `realistic' δ-doping layer," Surf. Sci., Vol. 196, No. 1-3, 671-676, 1988.
doi:10.1016/0039-6028(88)90760-1
9. Ullrich, B., C. Zhang, and K. V. Klitzing, "Quantum confined subband transitions of a GaAs sawtooth doping superlattice," Appl. Phys. Lett., Vol. 54, No. 12, 1133-1135, 1989.
doi:10.1063/1.100739
10. Ke, M. L., J. S. Rimmer, B. Hamilton, J. H. Evans, M. Missous, K. E. Singer, and P. Zalm, "Radiative transitions associated with hole confinement at Si δ-doped planes in GaAs," Phys. Rev., Vol. B45, No. 24, 14114-14121, 1992.
11. Chang, C. Y., W. Lin, W. C. Hsu, T. S. Wu, S. Z. Chang, and C.Wang, "The δ-doped In0.25Ga0.75As/GaAs pseudomorphic high electron mobility transistor structures prepared by low-pressure metal organic chemical vapor deposition," Jpn. J. Appl. Phys., Vol. 30, No. 6, 1158-1163, 1991.
doi:10.1143/JJAP.30.1158
12. Ni, W.-X., G. V. Hansson, J.-E. Sundgren, L. Hultman, L. R. Wallenberg, J.-Y. Yao, L. C. Markert, and J. E. Greene, "δ-function-shaped Sb-doping profiles in Si(001) obtained using a low-energy accelerated-ion source during molecular-beam epitaxy," Phys. Rev., Vol. B46, No. 12, 7551-7558, 1992.
13. Kuo, T. Y., J. E. Cunningham, E. F. Schubert, W.T. Tsang, T. H. Chiu, F. Run, and C. G. Constad, "Selectively δ doped quantum well transistor grown by gas source molecular beam epitaxy," J. Appl. Phys., Vol. 64, No. 6, 3324-3327, 1988.
doi:10.1063/1.341513
14. Gossmann, H.-J., C. S. Rafferty, A. M. Vredenberg, H. S. Luftman, F. C. Unterwald, D. J. Eaglesham, D. C. Jacobson, T. Boone, and J. M. Poate, "Time dependence of dopant diffusion in δ-doped Si films and properties of Si point defects," Appl. Phys. Lett., Vol. 64, No. 3, 312-314, 1994.
doi:10.1063/1.111189
15. Schubert, E. F., J. E. Cunningham, and W. T. Tsang, "Electron-mobility enhancement and electron-concentration enhancement in δ-doped n-GaAs at T = 300 K," Solid State Commun., Vol. 63, No. 7, 591-594, 1987.
doi:10.1016/0038-1098(87)90859-3
16. Liu, D. G., J. C. Fan, C. P. Lee, K. H. Chang, and D. C. Liou, "Transmission electron microscopy study of heavily delta-doped GaAs grown by molecular beam epitaxy," J. Appl. Phys., Vol. 73, No. 2, 608-614, 1993.
doi:10.1063/1.353370
17. Headrick, R. L., B. E. Weir, A. F. J. Levi, D. J. Eaglesham, and L. C. Feldman, "Si(100) (2x1) boron reconstruction: Self-limiting monolayer doping," Appl. Phys. Lett., Vol. 57, No. 26, 2779-2781, 1990.
doi:10.1063/1.103785
18. Zhu, J.-H., D.-W. Gong, B. Zhang, F. Lu, C. Sheng, H.-H. Sun, and X. Wang, "Admittance spectroscopy studies of boron δ-doped Si quantum wells," Phys. Rev., Vol. B52, No. 12, 8959-8963, 1995.
19. Wang, Y., R. J. Hamers, and E. Kaxiras, "Atomic structure and bonding of boron-induced reconstructions on Si(001)," Phys. Rev. Lett., Vol. 74, No. 3, 403-406, 1995.
doi:10.1103/PhysRevLett.74.403
20. Zheng, X., T. K. Carns, K. L. Wang, and B. Wu, "Electron mobility enhancement from coupled wells in delta-doped GaAs," Appl. Phys. Lett., Vol. 62, No. 5, 504-506, 1993.
doi:10.1063/1.108893
21. Gurtovoi, V. L., V. V. Valyaev, S. Y. Shapoval, and A. N. Pustovit, "Electron transport properties of double delta-doped GaAs structures grown by low-pressure metalorganic chemical vapor deposition," Appl. Phys. Lett., Vol. 72, No. 10, 1202-1204, 1998.
doi:10.1063/1.121013
22. Kiunke, W., E. Hammerl, I. Eisele, D. Schulze, and G. Gobsch, "Electrical transport between delta layers in silicon," J. Appl. Phys., Vol. 72, No. 8, 3602-3605, 1992.
doi:10.1063/1.352300
23. Sasagawa, R., H. Sugawara, Y. Ohno, H. Nakajima, S. Tsujino, H. Akiyama, and H. Sakaki, "Enhancement of intersubband transition energies in GaAs quantum wells by Si delta doping of high concentration," Appl. Phys. Lett., Vol. 72, No. 6, 719-721, 1998.
doi:10.1063/1.120856
24. Shena, T.-C., J.-Y. Ji, M. A. Zudov, R.-R. Du, J. S. Kline, and J. R. Tucker, "Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors," Appl. Phys. Lett., Vol. 80, No. 9, 1580-1582, 2002.
doi:10.1063/1.1456949
25. Oberbeck, L., N. J. Curson, M. Y. Simmons, R. Brenner, A. R. Hamilton, S. R. Schofield, and R. G. Clark, "Encapsulation of phosphorus dopants in silicon for the fabrication of a quantum computer," Appl. Phys. Lett., Vol. 81, No. 17, 3197-3199, 2002.
doi:10.1063/1.1516859
26. Oberbeck, L., N. J. Curson, T. Hallam, M. Y. Simmons, G. Bilger, and R. G. Clark, "Measurement of phosphorus segregation in silicon at the atomic scale using scanning tunneling microscopy," Appl. Phys. Lett., Vol. 85, No. 8, 1359-1361, 2004.
doi:10.1063/1.1784881
27. Kul'bachinskii, V. A., V. G. Kytin, R. A. Lunin, V. G. Mokerov, A. P. Senichkin, A. S. Bugaev, A. L. Karuzskii, A. V. Perestoronin, R. T. F. van Schaijk, and A. de Visser, "Transport and optical properties of tin delta-doped GaAs structures," Semiconductors, Vol. 33, No. 7, 771-778, 1999.
doi:10.1134/1.1187779
28. Ahn, D., "Intersubband transitions in a δ-doped semiconductor with an applied electric field: Exact solutions," Phys. Rev., Vol. B48, No. 11, 7981-7985, 1993.
29. Ozturk, E., "Optical intersubband transitions in double Si δ-doped GaAs under an applied magnetic field," Superlattices and Microstructures, Vol. 46, No. 5, 752-755, 2009.
doi:10.1016/j.spmi.2009.07.013
30. Ozturk, E. and I. Sokmen, "The electric field effects on intersubband optical absorption of Si δ-doped GaAs layer," Solid-State Commun., Vol. 126, No. 11, 605-609, 2003.
doi:10.1016/S0038-1098(03)00301-6
31. Ozturk, E. and I. Sokmen, "Intersubband transitions for single, double and triple Si δ-doped GaAs layers," 2003 J. Phys. D, Vol. 36, No. 20, 2457-2464, 2003.
doi:10.1088/0022-3727/36/20/006
32. Kim, K. T., S. S. Lee, and S. L. Chiang, "Inter miniband optical absorption in a modulation doped AlxGa1-xAs/GaAs superlattice," J. Appl. Phys., Vol. 69, No. 9, 6617-6624, 1991.
doi:10.1063/1.348875
33. Ozturk, E. and I. Sokmen, "Effect of magnetic fields on the linear and nonlinear intersubband optical absorption coefficients and refractive index changes in square and graded quantum wells," Superlattices and Microstructures, Vol. 48, No. 3, 312-320, 2010.
doi:10.1016/j.spmi.2010.06.015
34. Schubert, E. F., "Delta-doping of semiconductors: Electronic, optical, and structural properties of materials and devices," Semiconductors and Semimetals, Vol. 40, Chapter 1, 1-151, Elsevier, Amsterdam, 1994.
35. Fu, Y. and M. Willander, "Physical Models of Semiconductor Quantum Devices," Kluwer, Dordrecht, NL, 1999.
36. Zeindl, H. P., T. Wegehaupt, I. Eisele, H. Oppolzer, H. Reisinger, G. Tempel, and F. Koch, "Growth and characterization of a delta-function doping layer in Si," Appl. Phys. Lett., Vol. 50, 1164-1166, 1987.
doi:10.1063/1.97950
37. Li, H.-M., K.-F. Berggren, W.-X. Ni, B. E. Sernelius, M. Willander, and G. V. Hansson, "Tunneling current spectroscopy of electron subbands in n-type δ-doped silicon structures grown by molecular beam epitaxy," J. Appl. Phys., Vol. 67, No. 4, 1962-1968, 1990.
doi:10.1063/1.345575
38. Ramdas Ram-Mohan, L., Finite Element and Boundary Element Applications in Quantum Mechanics, Oxford University Press, New York, Oxford, 2002.
39. Hurkx, G. A. M. and A. van Haeringen, "Self-consistent calculations on GaAs-AlxGa1-xAs heterojunctions," J. Phys. C: Solid State Phys, Vol. 18, No. 29, 5617-5628, 1985.
doi:10.1088/0022-3719/18/29/012
40. Simserides, C. D. and G. P. Triberis, "A systematic study of electronic states in n-AlxGa1-xAs/GaAs/n-AlxGa1-xAs selectively doped double-heterojunction structures," J. Phys.: Condens. Matter, Vol. 5, No. 35, 6437-6446, 1993.
doi:10.1088/0953-8984/5/35/009
41. Xu, W. and J. Mahanty, "The influence of Si delta doping on the electronic structure of AlGaAs-GaAs-AlGaAs single quantum wells," J. Phys.: Condens. Matter, Vol. 6, No. 25, 4745-4762, 1994.
doi:10.1088/0953-8984/6/25/013
42. Simserides, C. D. and G. P. Triberis, "Looking for the maximum low-temperature conductivity in selectively doped AlxGa1-xAs-GaAs-AlxGa1-xAs double heterojunctions," J. Phys.: Condens. Matter, Vol. 8, No. 30, L421-L430, 1996.
doi:10.1088/0953-8984/8/30/002
43. Xu, W., "Self-consistent electronic subband structure in terahertz-driven two-dimensional electron gases," Europhys. Lett., Vol. 40, No. 4, 411-416, 1997.
doi:10.1209/epl/i1997-00480-8
44. Green, T. J. and W. Xu, "Population inversion in an optically pumped single quantum well," J. Appl. Phys., Vol. 88, No. 6, 3166-3169, 2000.
doi:10.1063/1.1287604
45. Xu, W., P. A. Folkes, and G. Gumbs, "Self-consistent electronic subband structure of undoped InAs/GaSb-based type II and broken-gap quantum well systems," J. Appl. Phys., Vol. 102, No. 3, 033703-9, 2007.
46. Ozturk, E., "Effect of magnetic field on a p-type δ-doped GaAs layer," Chinese Phys. Lett., Vol. 27, No. 7, 077302-5, 2010.
doi:10.1088/0256-307X/27/7/077302
47. Shpatakovskaya, G. V., "Semiclassical model of the structure of matter," Phys. Usp., Vol. 55, No. 5, 429-464, 2012.
doi:10.3367/UFNe.0182.201205a.0457
48. Ioriatti, L., "Thomas-Fermi theory of δ-doped semiconductor structures: Exact analytical results in the high-density limit," Phys. Rev., Vol. B41, No. 12, 8340-8344, 1990.
49. Rodriguez-Vargas, I. and L. M. Gaggero-Sager, "Subband structure comparison between n- and p-type double delta-doped GaAs quantum wells," Revista Mexicana de Fisica, Vol. 50, No. 6, 614-619, 2004.
50. Gaggero-Sager, L. M., "Exchange and correlation via functional of Thomas-Fermi in delta-doped quantum wells," Modelling Simul. Mater. Sci. Eng., Vol. 9, No. 1, 1-6, 2001.
doi:10.1088/0965-0393/9/1/301
51. Oubram, O., O. Navarro, L. M. Gaggero-Sager, J. C. Martinez-Orozco, and I. Rodrguez-Vargas, "The hydrostatic pressure effects on intersubband optical absorption of n-type δ-doped quantum well in GaAs," Solid State Sciences, Vol. 14, No. 4, 440-444, 2012.
doi:10.1016/j.solidstatesciences.2012.01.020
52. Gulveren, B., "Quantum dot with N interacting electrons confined in a power-law external potential," Solid State Sciences, Vol. 14, No. 1, 94-99, 2012.
doi:10.1016/j.solidstatesciences.2011.11.001
53. Drumm, D. W., A. Budi, M. C. Per, S. P. Russo, and L. C. L. Hollenberg, "Ab initio calculation of valley splitting in monolayer δ-doped phosphorus in silicon," Nanoscale Research Letters, Vol. 8, No. 1, 111-121, 2013.
doi:10.1186/1556-276X-8-111
54. Carter, D. J., N. A. Marks, O. Warschkow, and D. R. McKenzie, "Phosphorus δ-doped silicon: Mixed-atom pseudopotentials and dopant disorder effects," Nanotechnology, Vol. 22, No. 6, 065701-10, 2011.
doi:10.1088/0957-4484/22/6/065701
55. Brennan, K. F., The Physics of Semiconductors, Cambridge Univ. Press, Cambridge, 1999.
56. Grimalsky, V., L. M. Gaggero-Sager, and S. Koshevaya, "Electron spectrum of delta-doped quantum wells by the Thomas-Fermi method at finite temperatures," Physica B, Vol. 406, No. 2, 2218-2222, 2011.
doi:10.1016/j.physb.2011.03.034
57. Gummel, H. K., "A self-consistent iterative scheme for one-dimensional steady state transistor calculations," IEEE Trans. Electron. Dev., Vol. 11, No. 10, 455-465, 1964.
doi:10.1109/T-ED.1964.15364
58. Rodriguez-Vargas, I., M. L. Gaggero-Sager, V. V. Grimalsky, M. E. Mora-Ramos, and R. Perez-Alvarez, "Electron spectrum of single n-type delta-doped quantum wells in Si," PIERS Proceedings, 248-251, Beijing, China, Mar. 26-30, 2007.
59. Grimalsky, V., L. M. Gaggero-Sager, S. Koshevaya, and M. C. Castrejon, "Combined method for simulating electron spectrum of δ-doped quantum wells in n-Si," Proc. 28th Internat. Conference on Microelectronics (MIEL 2012), 305-308, Nis, Serbia, May 13-16, 2012.