2009-04-02
Procedure for the Design of Ladder Baw Filters Taking Electrodes into Account
By
Progress In Electromagnetics Research Letters, Vol. 7, 127-137, 2009
Abstract
This paper aims to complete a published systematic methodology for the design of ladder BAW filters in order to include the effect of the electrodes, since infinitely thin electrodes are assumed in this design methodology. The new procedure is validated against the work of other authors, finding very good agreement between results.
Citation
Oscar Menendez, Pedro de Paco, Eden Corrales, and Jordi Verdu, "Procedure for the Design of Ladder Baw Filters Taking Electrodes into Account," Progress In Electromagnetics Research Letters, Vol. 7, 127-137, 2009.
doi:10.2528/PIERL09031605
References

1. Aigner, R., "MEMS in RF filter applications: Thin-film bulk acoustic wave technology," Wiley InterSciencie: Sensors Update, Vol. 12, 175-210, 2003.
doi:10.1002/seup.200390006        Google Scholar

2. Lakin, K. M., "Thin film resonator technology," IEEE Trans. Ultrason. Ferroelect., Freq. Contr., Vol. 52, 707-716, 2005.
doi:10.1109/TUFFC.2005.1503959        Google Scholar

3. Menéndez, O., P. de Paco, R. Villarino, and J. Parrón, "Closed-form expressions for the design of ladder-type FBAR filters," IEEE Microwave Wireless Compon. Lett., Vol. 16, 657-659, 2006.
doi:10.1109/LMWC.2006.885610        Google Scholar

4. Ylilammi, M., J. Ella, M. Partanen, and J. Kaitila, "Thin film bulk acoustic wave filter," Freq. Contr., Vol. 49, 535-539, 2002.        Google Scholar

5. Kim, Y., K. Sunwoo, S. Sul, J. Lee, D. Kim, I. Song, S. Choa, and J. Yook, "Highly miniaturized RF bandpass filter based on thin-film bulk acoustic-wave resonator for 5-GHz-band application," IEEE Trans. Microwave Theory Tech., Vol. 54, 1218-1228, 2006.
doi:10.1109/TMTT.2005.864100        Google Scholar

6. Rosenbaum, J. F., Bulk Acoustic Wave Theory and Devices, Artech House, 1988.

7. Aigner, R., "Bringing BAW technology into volume production: The ten commandments and the seven deadly sins," 3rd International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems, 2007.        Google Scholar

8. Lakin, K. M., "Equivalent circuit modeling of stacked crystal filters," Proc. 35th Ann. Freq. Control Symposium, 257-262, 1981.        Google Scholar

9. Lee, S., K. Yoon, and J. Lee, "Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators," Journal of Applied Physics, Vol. 92, 4062-4069, 2002.
doi:10.1063/1.1505977        Google Scholar

10. Ella, J., "Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators,", United States Patent 5910756, 1999.        Google Scholar

11. Mason, W. P., Physical Acoustics: Principles and Methods, Vol. 1, Academic Press, 1964.