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Study of Resistive Thin-Film Coatings for Application in Millimeter-Band Vacuum Power Amplifiers

By Andrey V. Starodubov, Stanislav Andreevich Makarkin, Alexey Alexandrovich Serdobintsev, Anton Mikhailovich Pavlov, Victor Vladimirovich Galushka, and Ilya Olegovich Kozhevnikov
Progress In Electromagnetics Research C, Vol. 105, 23-33, 2020


The aim of this work is to discuss the possibility of resistive thin-film coatings used for vacuum electron devices. Following a short review, results on radiophysical parameters studies in millimeter-band of such coatings are presented. Resistive Sn-O coatings with varied oxygen content were fabricated on quartz substrates by reactive magnetron sputtering. Morphology and elemental composition of prepared coatings were studied by means of scanning electron microscopy and secondary ion mass spectrometry, while four-probe method was utilized to study the resistivity of those. Dielectric properties were measured in the V-band (50-70 GHz) in free space using vector network analyzer. It was demonstrated that resistivity and the dielectric properties of coating in millimeter-band can be widely varied by controlling coating composition.


Andrey V. Starodubov, Stanislav Andreevich Makarkin, Alexey Alexandrovich Serdobintsev, Anton Mikhailovich Pavlov, Victor Vladimirovich Galushka, and Ilya Olegovich Kozhevnikov, "Study of Resistive Thin-Film Coatings for Application in Millimeter-Band Vacuum Power Amplifiers," Progress In Electromagnetics Research C, Vol. 105, 23-33, 2020.


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