volume | PIER Journals

Abstract

This paper presents a newly developed rod-electrode-type microwave plasma source (MPS), which is mainly composed of a panel mount coaxial connector, a self-made metal adapter with an inlet and outlet of working gas, a quartz tube as a flow path of working gas, and a metal rod-electrode. Microwave energy can be then supplied directly to the working gas from the sharp tip of the metal rod-electrode through the panel mount coaxial connector. To verify the validity of the rod-electrode-type MPS, a reasonable microwave power supply system is built to transmit the microwave power from a magnetron to the panel mount coaxial connector. The experiments demonstrate that the rod-electrode-type MPS can convert by autoignition argon (Ar) into plasma at atmospheric pressure. Moreover, the Ar plasma can be changed to dry air (Air) plasma or nitrogen (N₂) plasma by gradually replacing Ar with Air or N₂. The experimental results show that the rod-electrode-type MPS is potentially an available tool for gas processing at atmospheric pressure.

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Dr. Hidenori Sekiguchi