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2021-10-29
17-30 GHz Reliable and Compact Analog Phase Shifter Using Lateral Micromachined SP7T Switches, and DMTL Arrays
By
Progress In Electromagnetics Research C, Vol. 116, 157-169, 2021
Abstract
In this work, a radio frequency (RF) micro-electromechanical system (MEMS) based analog phase shifter is presented over 17-30 GHz. The proposed phase shifter is made using two back-to-back single-pole-seven-throw (SP7T) switches and connected through seven distributed MEMS transmission lines (DMTL). The SP7T switch is designed with lateral electrostatic actuation and demonstrates measured average return loss of > 11.3 dB, insertion loss of < 5.94 dB, and isolation of > 22 dB up to 30 GHz. Total area of the SP7T switch is only 0.89 mm2 including bias lines and pads. The proposed wide-band phase shifter can be tuned at all the frequencies between 17 and 30 GHz. Phase shifter gives measured average insertion loss of < 6.94 dB, return loss of > 10 dB, and phase error of ~10 at 17 GHz to 30 GHz over 500 MHz bandwidth. All phase shifts can be tracked with a resolution of 22.50 based on predefined actuation voltages. Total area of the fabricated device is ~11.72 mm2. In addition, switches and phase shifter work satisfactorily > 1 billion cycles with 0.1-1 W of RF power. The proposed phase shifter bank gives phase shifting performances at each frequency over 17-30 GHz with a constant resolution utilizing analog tuning, and it operates > 1 billion cycles of reliability with 1 W of RF power.
Citation
Sukomal Dey Shiban Kishen Koul Ajay K. Poddar Ulrich L. Rohde , "17-30 GHz Reliable and Compact Analog Phase Shifter Using Lateral Micromachined SP7T Switches, and DMTL Arrays," Progress In Electromagnetics Research C, Vol. 116, 157-169, 2021.
doi:10.2528/PIERC21082002
http://www.jpier.org/PIERC/pier.php?paper=21082002
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