2013-12-16
Coplanar-Pgl Transitions on High Resistivity Silicon Substrate in the 57-64 GHz Band and Influence of the Probe Station on the Performances
By
Progress In Electromagnetics Research M, Vol. 34, 79-87, 2014
Abstract
We present Coplanar-Planar Goubau Line (PGL) transitions designed on high-resistivity Silicon to characterize a PGL using microwave probing. These transitions are optimized in the 57-64 GHz frequency band to present excellent electrical performances despite the field disturbance of the measurement setup. As the transitions are positioned on a probe station chuck, a glass substrate is added between the transition under test and the metallic chuck to minimize the disturbance. 3-D full-wave electromagnetic field simulations performed on a commercial software and on-wafer measurements show almost comparable results in term of scattering matrix parameters. Low losses are attained with a measured average transmission parameter of 2.5 dB at 60 GHz for a length of 8 mm of a back-to-back structure with the transitions at the extremities. The measured average insertion loss and return loss per transition are better than 1.36 dB and 11 dB, respectively, with a bandwidth greater than 7% at 60 GHz for a length of 1 mm (about a half of the wavelength at 60 GHz).
Citation
Marjorie Grzeskowiak, Julien Emond, Gaelle Lissorgues, Stephane Protat, Frederique Deshours, Elodie Richalot, and Odile Picon, "Coplanar-Pgl Transitions on High Resistivity Silicon Substrate in the 57-64 GHz Band and Influence of the Probe Station on the Performances," Progress In Electromagnetics Research M, Vol. 34, 79-87, 2014.
doi:10.2528/PIERM13110704
References

1. Kuri, T., K. Kitayama, A. Stohr, and Y. Ogawa, "Fiber-optic millimeter-wave downlink system using 60 GHz-band external modulation," Journal of Lightwave Technology, Vol. 17, 799-806, 1999.
doi:10.1109/50.762895        Google Scholar

2. Yang, T. H., C. F. Chen, T. Y. Huang, C. L. Wang, and R. B. Wu, "A 60 GHz LTCC transition between microstrip line and substrate integrated waveguide," Asia-Pacific Conference Proceedings --- | Microwave Conference Proceedings, Vol. 1, 2005.
doi:10.1109/TMTT.2010.2050094        Google Scholar

3. Bulja, S. and D. Mirshekar-Syahkal, "Novel wideband transition between coplanar waveguide and microstrip line," IEEE Transactions on Microwave Theory and Techniques, Vol. 58, No. 7, 1851-1857, 2010.
doi:10.1109/EUMC.2007.4405145        Google Scholar

4. Patrovsky, A., M. Daigle, and K.Wu, "Millimeter-wave wideband transition from CPW to substrate integrated waveguide on electrically thick high-permittivity substrates," 2007 European Microwave Conference, 138-141, 2007.
doi:10.1109/TMTT.2005.859862        Google Scholar

5. Stephens, D., P. R. Young, and I. D. Robertson, "Millimeter-wave substrate integrated waveguides and filters in photoimageable thick-film technology," IEEE Transactions on Microwave Theory and Techniques, Vol. 53, No. 12, 3832-3838, 2005.        Google Scholar

6. Boone, J., S. Krishnan, and S. Bhansali, "Silicon based vertical micro-coaxial for high frequency packaging technologies ," Progress In Electromagnetics Research B, Vol. 50, 1-7, 2013.
doi:10.1049/el.2010.3262        Google Scholar

7. Enayati, A., S. Brebels, W. Deraedt, and G. A. E. Vandenbosch, "Vertical via-less transition in MCM Technology for millimetre-wave applications," Electronics Letters, Vol. 46, No. 4, 287-288, 2010.        Google Scholar

8. Gauthier, G. P., L. P. Katehi, and G. M. Rebeiz, "W-band finite ground coplanar waveguide (FGCPW) to microstrip transition," IEEE MTT-S Int. Microw. Symp. Dig., Vol. 1, 107-109, 1998.
doi:10.1109/ICCPS.2012.6384277        Google Scholar

9. Xia, L. and R. Xu, "Broadband LTCC transition from coaxial connector to stripline for 60 GHz application," International Conference on Computational Problem-Solving (ICCP), 52-54, 2012.        Google Scholar

10. Zandieh, A., N. Ranjkesh, S. Safavi-Naeini, and M. Basha, "A low loss CPW to dielectric waveguide transition for millimeter-wave hybrid integration," Antennas and Propagation Society International Symposium (APSURSI), 1-2, 2012.
doi:10.1049/el.2010.0986        Google Scholar

11. El-Gibari, M., D. Averty, C. Lupi, M. Brunet, H. Li, and S. Toutain, "Ultra-broad bandwidth and low-loss GCPW-MS transitions on low k-substrates," Electronics Letters, Vol. 46, No. 13, 931-933, 2010.
doi:10.1049/iet-map.2010.0025        Google Scholar

12. Xu, Y., C. Nerguizian, and R. G. Bosisio, "Wideband planar goubau line integrated circuit components at millimetre waves," IET Microwave, Antennas Propagation, Vol. 5, No. 8, 882-885, 2011.
doi:10.1109/LMWC.2005.859976        Google Scholar

13. Treizebre, A., T. Akalin, and B. Bocquet, "Planar excitation of goubau transmission lines for THz BioMEMS," IEEE Microwave and Wireless Letters, Vol. 15, No. 12, 886-888, 2005.
doi:10.1049/iet-map.2013.0093        Google Scholar

14. Xu, Y. and R. G. Bosisio, "Wideband planar Goulau line (PGL) couplers and six-port circuits compatible with short range (60 GHz) radio," IET Microwaves, Antennas Propagation, Vol. 7, No. 12, 985-990, 2013.
doi:10.1109/LAWP.2013.2278035        Google Scholar

15. Sanchez-Escuderos, D., M. Ferrando-Battaler, J. I. Herranz, and M. Cabedo-Fabres, "Periodic leaky-wave antenna on planar Goubau line at millimeter-wave frequencies," IEE Antennas and Wireless Propagation Letters, Vol. 12, 1006-1009, 2013.
doi:10.1002/mop.26470        Google Scholar

16. Emond, J., M. Grzeskowiak, G. Lissorgues, S. Protat, F. Deshours, E. Richalot, and O. Picon, "A low planar Goubau line and a coplanar-PGL transition on high resistivity Silicon substrate in the 57--64 GHz band, ," Microwave and Optical Letters, Vol. 54, No. 1, 164-168, 2012.        Google Scholar

17. Grzeskowiak, M., J. Emond, S. Protat, G. Lissorgues, F. Deshours, E. Richalot, and O. Picon, "Optimization on of a quasi loss less air-cavity inverted microstrip line form microwave frequencies and comparison with the coplanar line at 60 GHz," Progress In Electromagnetics Research, Vol. 43, 67-78, 2013.        Google Scholar

18. "On-wafer vector network analyzer calibration and measurements," Application Note.
doi:10.1002/mop.20812        Google Scholar

19. Safwat, M. E., "Study of microstrip mode in RF on-wafer probes," Microwave and Optical Letters, Vol. 45, No. 4, 324-328, 2005.
doi:10.1002/mop.27245        Google Scholar

20. Ghaff, , F. A. and A. Shamim, "Design of silicon-based fractal antennas," Microwave and Optical Letters, Vol. 55, No. 1, 180-186, 2013.        Google Scholar