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2026-10-14
Femtosecond Laser-Induced Bulk Modification of Transparent Materials
By
Progress In Electromagnetics Research, Vol. 186, 96-109, 2026
Abstract
Transparent materials, such as fused silica, sapphire, and lithium niobate, are widely used as windows and substrates in advanced optical and laser systems because of their high transparency, low optical loss, and excellent thermal and chemical stability. Consequently, precise bulk modification of these materials is essential for fabricating advanced internal photonic devices. However, conventional processing methods are often limited to surface processing, involve complex procedures, and lack the capability for precise three-dimensional (3D) internal structuring of the material. In contrast, femtosecond (fs) laser-induced bulk modification enables highly localized energy deposition inside transparent materials through nonlinear absorption, thereby allowing refractive-index modification and true 3D structuring with minimal impact on the outer surface. Consequently, researchers can fabricate various functional internal structures, including buried waveguides, nanogratings (NGs), and nanovoids, within transparent materials. This paper summarizes the recent progress in fs laser-induced bulk modification of transparent materials. It focuses on the underlying bulk-modification mechanisms and formation of internal structures. Finally, this paper discuss representative applications of these structures in integrated photonics, high-density optical data storage, and sensing in harsh environments.
Citation
Yue Lu, Yunfei Li, Gong Wang, Yu Ding, Zhen Zhang, Zhenxu Bai, Yulei Wang, and Zhiwei Lu, "Femtosecond Laser-Induced Bulk Modification of Transparent Materials," Progress In Electromagnetics Research, Vol. 186, 96-109, 2026.
DOI:10.2528/PIER26072505
References

1. Peng, Liang, Hang Ren, Ya-Chao Liu, Tian-Wei Lan, Kui-Wen Xu, De-Xin Ye, Hong-Bo Sun, Su Xu, Hong-Sheng Chen, and Shuang Zhang, "Spin Hall effect of transversely spinning light," Science Advances, Vol. 8, No. 34, 6033, 2022.
doi:10.1126/sciadv.abo6033        Google Scholar

2. Li, Yuanzhen, Su Xu, Zijian Zhang, Yumeng Yang, Xinrong Xie, Wenzheng Ye, Feng Liu, Haoran Xue, Liqiao Jing, Zuojia Wang, Qi-Dai Chen, Hong-Bo Sun, Erping Li, Hongsheng Chen, and Fei Gao, "Polarization-orthogonal nondegenerate plasmonic higher-order topological states," Physical Review Letters, Vol. 130, No. 21, 213603, May 2023.
doi:10.1103/physrevlett.130.213603        Google Scholar

3. Zhang, Bo, Zhuo Wang, Tom Albrow-Owen, Tawfique Hasan, Zesheng Chen, Zhiying Song, Gongyuan Zhang, Hannah Joyce, Dezhi Tan, Qiangbing Guo, Cheng-wei Qiu, Zongyin Yang, and Jianrong Qiu, "3D ultra-broadband optically dispersive microregions in lithium niobate," Nature Communications, Vol. 16, No. 1, 6086, July 2025.
doi:10.1038/s41467-025-61317-9        Google Scholar

4. Winkler, Sarah, Joachim R. Krenn, Jakob Wahl, Alexander Zesar, Yves Colombe, Klemens Schüppert, Clemens Rössler, Christian Sommer, Philipp Hurdax, Philip Lichtenegger, and Bernhard Lamprecht, "Femtosecond laser-written waveguides in sapphire for visible light delivery," Optics Continuum, Vol. 4, No. 6, 1212, June 2025.
doi:10.1364/optcon.529245        Google Scholar

5. Ren, Hang, Su Xu, Zhidong Lyu, Yuanzhen Li, Zuomin Yang, Quan Xu, Yong-Sen Yu, Yanfeng Li, Fei Gao, Xianbin Yu, Jiaguang Han, Qi-Dai Chen, and Hong-Bo Sun, "Terahertz flexible multiplexing chip enabled by synthetic topological phase transitions," National Science Review, Vol. 11, No. 8, 116, March 2024.
doi:10.1093/nsr/nwae116        Google Scholar

6. Ren, Hang, Xu-Lin Zhang, Zhidong Lyu, Hong Chen, Ya-Qi Song, Lei Wang, Yong-Sen Yu, Xianbin Yu, Qi-Dai Chen, and Su Xu, "Non-hermitian loss-driven broadband low-loss on-chip terahertz photonic SPDT switch," Laser & Photonics Reviews, Vol. 19, No. 5, 2401456, November 2024.
doi:10.1002/lpor.202401456        Google Scholar

7. Wu, Jiayi, Chunmei Ouyang, Jiajun Ma, Hongyi Li, Zhao-Hua Xu, Xiaoyuan Hao, Quan Xu, Jianqiang Gu, Su Xu, Yanfeng Li, Jiaguang Han, and Weili Zhang, "Reconfigurable BIC-based intrinsic chiral all-dielectric terahertz metasurfaces," Laser & Photonics Reviews, Vol. 19, No. 23, 00674, July 2025.
doi:10.1002/lpor.202500674        Google Scholar

8. Mikšová, Romana, Pavla Nekvindová, Petr Aubrecht, and Anna Macková, "Optical response of channel waveguides in silicate glass created via ion implantation with optical barriers of varying thickness," Optics & Laser Technology, Vol. 183, 112333, May 2025.
doi:10.1016/j.optlastec.2024.112333        Google Scholar

9. Qin, Zhi‐Jun, Zhao-Hua Xu, Hui Zheng, Ya‐Qi Song, Hang Ren, Wen-Ya Wang, Hong Chen, Jia-Jun Liang, Xiao-Liang Ge, Guan-Long Huang, and Su Xu, "Sub-terahertz broadband polarization-reconfigurable radiation based on spoof surface plasmon polaritons," Laser & Photonics Reviews, Vol. 20, No. 12, 02111, February 2026.
doi:10.1002/lpor.202502111        Google Scholar

10. Sun, Yi-Ke, Yu-Qing Liu, Qi-Dai Chen, and Yong-Lai Zhang, "Femtosecond laser 3D nanoprinting using inorganic nano-building blocks," The Innovation, Vol. 6, No. 3, 100772, March 2025.
doi:10.1016/j.xinn.2024.100772        Google Scholar

11. Ge, Xiao‐Liang, Su Xu, Tian-Tai Zhang, Zhuo-Tong Li, Jia-Qi Feng, Hang Ren, Dong-Dong Han, and Yong-Lai Zhang, "Self-adaptive mechanical metasurface enabling zero-power-consumption thermal management of electronic devices," Advanced Materials, Vol. 38, No. 14, 09005, March 2026.
doi:10.1002/adma.202509005        Google Scholar

12. Zheng, Wenyan, Zhuo Wang, Weilin Chen, Mengchao Zhang, Hui Li, Guang Yang, Qiang Xu, Xvsheng Qiao, Dezhi Tan, Junjie Zhang, Jianrong Qiu, Guodong Qian, and Xianping Fan, "Unlocking high photosensitivity direct laser writing and observing atomic clustering in glass," Nature Communications, Vol. 15, No. 1, 8366, September 2024.
doi:10.1038/s41467-024-52628-4        Google Scholar

13. Zhu, Lin, Yu-Qing Liu, Jia-Yi Wan, Zhi-Juan Sun, Dong-Dong Han, Qi-Dai Chen, and Yong-Lai Zhang, "Ultra-compact on-chip camera based on optoelectronic compound eyes with nonuniform ommatidia," International Journal of Extreme Manufacturing, Vol. 7, No. 1, 015502, November 2024.
doi:10.1088/2631-7990/ad8738        Google Scholar

14. Liu, Yanan, Ye Ding, Zeping Liu, Xingchen Li, Sichao Tian, Lishuang Fan, Jichang Xie, Liangliang Xu, Jinwoo Lee, Jian Li, and Lijun Yang, "Ultrafast laser one-step construction of 3D micro-/nanostructures achieving high-performance zinc metal anodes," PhotoniX, Vol. 5, No. 1, 6, March 2024.
doi:10.1186/s43074-024-00122-x        Google Scholar

15. Liu, Xue-Qing, Ben-Feng Bai, Qi-Dai Chen, and Hong-Bo Sun, "Etching-assisted femtosecond laser modification of hard materials," Opto-Electronic Advances, Vol. 2, No. 9, 190021, 2019.
doi:10.29026/oea.2019.190021        Google Scholar

16. Sun, Bangshan, Fyodor Morozko, Patrick S. Salter, Simon Moser, Zhikai Pong, Raj B. Patel, Ian A. Walmsley, Mohan Wang, Adir Hazan, Nicolas Barré, Alexander Jesacher, Julian Fells, Chao He, Aviad Katiyi, Zhen-Nan Tian, Alina Karabchevsky, and Martin J. Booth, "On-chip beam rotators, adiabatic mode converters, and waveplates through low-loss waveguides with variable cross-sections," Light: Science & Applications, Vol. 11, No. 1, 214, July 2022.
doi:10.1038/s41377-022-00907-4        Google Scholar

17. Duan, Yan‐Zhao, Zhen-Nan Tian, Si-Xue Fei, Zhi-Yong Hu, Kai-Heng Xiao, Xu-Lin Zhang, and Qi-Dai Chen, "Three-dimensional ultra-compact mode converter enabled by femtosecond laser differential exposure," Laser & Photonics Reviews, Vol. 20, No. 11, 02306, January 2026.
doi:10.1002/lpor.202502306        Google Scholar

18. Tan, Dezhi, Kaniyarakkal N. Sharafudeen, Yuanzheng Yue, and Jianrong Qiu, "Femtosecond laser induced phenomena in transparent solid materials: Fundamentals and applications," Progress in Materials Science, Vol. 76, 154-228, March 2016.
doi:10.1016/j.pmatsci.2015.09.002        Google Scholar

19. Zhang, Bin, Wenchao Yan, and Feng Chen, "Recent advances in femtosecond laser direct writing of three-dimensional periodic photonic structures in transparent materials," Advanced Photonics, Vol. 7, No. 3, 034002, April 2025.
doi:10.1117/1.ap.7.3.034002        Google Scholar

20. Malinauskas, Mangirdas, Albertas Žukauskas, Satoshi Hasegawa, Yoshio Hayasaki, Vygantas Mizeikis, Ričardas Buividas, and Saulius Juodkazis, "Ultrafast laser processing of materials: From science to industry," Light: Science & Applications, Vol. 5, No. 8, 16133, March 2016.
doi:10.1038/lsa.2016.133        Google Scholar

21. Sugioka, Koji and Ya Cheng, "Ultrafast lasers-reliable tools for advanced materials processing," Light: Science & Applications, Vol. 3, No. 4, 149, April 2014.
doi:10.1038/lsa.2014.30        Google Scholar

22. Streltsov, Alexander M. and Nicholas F. Borrelli, "Study of femtosecond-laser-written waveguides in glasses," Journal of the Optical Society of America B, Vol. 19, No. 10, 2496, October 2002.
doi:10.1364/josab.19.002496        Google Scholar

23. Yao, Heng, Diego Pugliese, Matthieu Lancry, and Ye Dai, "Ultrafast laser direct writing nanogratings and their engineering in transparent materials," Laser & Photonics Reviews, Vol. 18, No. 9, 2300891, May 2024.
doi:10.1002/lpor.202300891        Google Scholar

24. Richter, S., M. Heinrich, S. Döring, A. Tünnermann, and S. Nolte, "Formation of femtosecond laser-induced nanogratings at high repetition rates," Applied Physics A, Vol. 104, No. 2, 503-507, June 2011.
doi:10.1007/s00339-011-6489-7        Google Scholar

25. Juodkazis, S., K. Nishimura, S. Tanaka, H. Misawa, E. G. Gamaly, B. Luther-Davies, L. Hallo, P. Nicolai, and V. T. Tikhonchuk, "Laser-induced microexplosion confined in the bulk of a sapphire crystal: Evidence of multimegabar pressures," Physical Review Letters, Vol. 96, No. 16, 166101, April 2006.
doi:10.1103/physrevlett.96.166101        Google Scholar

26. Juodkazis, Saulius, Hiroaki Misawa, Tomohiro Hashimoto, Eugene G. Gamaly, and Barry Luther-Davies, "Laser-induced microexplosion confined in a bulk of silica: Formation of nanovoids," Applied Physics Letters, Vol. 88, No. 20, 201909, May 2006.
doi:10.1063/1.2204847        Google Scholar

27. Okada, Tatsuya, Takuro Tomita, Shigeki Matsuo, Shuichi Hashimoto, Yoichiro Ishida, Satoshi Kiyama, and Tomonori Takahashi, "Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation," Journal of Applied Physics, Vol. 106, No. 5, 054307, September 2009.
doi:10.1063/1.3211311        Google Scholar

28. Davis, K. M., K. Miura, N. Sugimoto, and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Optics Letters, Vol. 21, No. 21, 1729, November 1996.
doi:10.1364/ol.21.001729        Google Scholar

29. Vega, F., J. Armengol, V. Diez-Blanco, J. Siegel, J. Solis, B. Barcones, A. Pérez-Rodríguez, and P. Loza-Alvarez, "Mechanisms of refractive index modification during femtosecond laser writing of waveguides in alkaline lead-oxide silicate glass," Applied Physics Letters, Vol. 87, No. 2, 021109, July 2005.
doi:10.1063/1.1994927        Google Scholar

30. Liao, Yang, Jia Qi, Peng Wang, Wei Chu, Zhaohui Wang, Lingling Qiao, and Ya Cheng, "Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam," Scientific Reports, Vol. 6, No. 1, 28790, June 2016.
doi:10.1038/srep28790        Google Scholar

31. Kifle, Esrom, Pavel Loiko, Xavier Mateos, Javier Rodríguez Vázquez de Aldana, Airan Ródenas, Uwe Griebner, Valentin Petrov, Magdalena Aguiló, and Francesc Díaz, "Femtosecond-laser-written hexagonal cladding waveguide in Tm:KLu(WO_4)_2: µ-Raman study and laser operation," Optical Materials Express, Vol. 7, No. 12, 4258-4268, November 2017.
doi:10.1364/ome.7.004258        Google Scholar

32. Ferrer, Andrés, Alexandro Ruiz de la Cruz, Daniel Puerto, Wojciech Gawelda, Juan A. Vallés, Miguel A. Rebolledo, Víctor Berdejo, Jan Siegel, and Javier Solis, "In situ assessment and minimization of nonlinear propagation effects for femtosecond-laser waveguide writing in dielectrics," Journal of the Optical Society of America B, Vol. 27, No. 8, 1688-1692, July 2010.
doi:10.1364/josab.27.001688        Google Scholar

33. Streltsov, Alexander M. and Nicholas F. Borrelli, "Fabrication and analysis of a directional coupler written in glass by nanojoule femtosecond laser pulses," Optics Letters, Vol. 26, No. 1, 42-43, January 2001.
doi:10.1364/ol.26.000042        Google Scholar

34. Miura, K., Jianrong Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Applied Physics Letters, Vol. 71, No. 23, 3329-3331, December 1997.
doi:10.1063/1.120327        Google Scholar

35. Wu, Bo, Bin Zhang, Weijie Liu, Qingming Lu, Lei Wang, and Feng Chen, "Recoverable and rewritable waveguide beam splitters fabricated by tailored femtosecond laser writing of lithium tantalate crystal," Optics & Laser Technology, Vol. 145, 107500, January 2022.
doi:10.1016/j.optlastec.2021.107500        Google Scholar

36. Torchia, G. A., A. Rodenas, A. Benayas, E. Cantelar, L. Roso, and D. Jaque, "Highly efficient laser action in femtosecond-written Nd:yttrium aluminum garnet ceramic waveguides," Applied Physics Letters, Vol. 92, No. 11, 111103, March 2008.
doi:10.1063/1.2890073        Google Scholar

37. Qi, Jia, Peng Wang, Yang Liao, Wei Chu, Zhengming Liu, Zhaohui Wang, Lingling Qiao, and Ya Cheng, "Fabrication of polarization-independent single-mode waveguides in lithium niobate crystal with femtosecond laser pulses," Optical Materials Express, Vol. 6, No. 8, 2554, July 2016.
doi:10.1364/ome.6.002554        Google Scholar

38. Bérubé, Jean-Philippe, Jerome Lapointe, Albert Dupont, Martin Bernier, and Réal Vallée, "Femtosecond laser inscription of depressed cladding single-mode mid-infrared waveguides in sapphire," Optics Letters, Vol. 44, No. 1, 37-40, December 2018.
doi:10.1364/ol.44.000037        Google Scholar

39. Nie, Weijie, Chen Cheng, Yuechen Jia, Carolina Romero, Javier R. Vázquez de Aldana, and Feng Chen, "Dual-wavelength waveguide lasers at 1064 and 1079 nm in Nd:YAP crystal by direct femtosecond laser writing," Optics Letters, Vol. 40, No. 10, 2437-2440, May 2015.
doi:10.1364/ol.40.002437        Google Scholar

40. Wang, Mohan, Patrick S. Salter, Frank P. Payne, Tongyu Liu, Martin J. Booth, and Julian A. J. Fells, "Laser-written scalable sapphire integrated photonics platform," Optics Express, Vol. 32, No. 26, 45600-45614, December 2024.
doi:10.1364/oe.540068        Google Scholar

41. Jia, Yuechen, Shixiang Wang, and Feng Chen, "Femtosecond laser direct writing of flexibly configured waveguide geometries in optical crystals: Fabrication and application," Opto-Electronic Advances, Vol. 3, No. 10, 190042, 2020.
doi:10.29026/oea.2020.190042        Google Scholar

42. Lee, Timothy, Qi Sun, Martynas Beresna, and Gilberto Brambilla, "Low bend loss femtosecond laser written waveguides exploiting integrated microcrack," Scientific Reports, Vol. 11, No. 1, 23770, December 2021.
doi:10.1038/s41598-021-03116-y        Google Scholar

43. Shen, Yiming, Bo Wu, Bin Zhang, and Feng Chen, "Femtosecond-laser-written helical cladding waveguides: 3D fabrication and mode modulation," Optics & Laser Technology, Vol. 163, 109337, August 2023.
doi:10.1016/j.optlastec.2023.109337        Google Scholar

44. Li, Lingqi, Pengda Wang, Lijuan Shi, Weijin Kong, and Feng Chen, "Femtosecond laser writing of S-curved dual-line waveguides in BGO crystal for mid-infrared band application," Optical Materials, Vol. 167, 117283, October 2025.
doi:10.1016/j.optmat.2025.117283        Google Scholar

45. Li, Shi-Ling, Yan Song, Li-Nan Ma, and Hai-Long Wang, "Femtosecond-laser-inscribed cladding waveguides in KTiOPO4 crystal for second-harmonic generation and Y-branch splitters," Frontiers in Physics, Vol. 12, 1341210, May 2024.
doi:10.3389/fphy.2024.1341210        Google Scholar

46. Skryabin, Nikolay, Alexander Kalinkin, Ivan Dyakonov, and Sergei Kulik, "Femtosecond laser written depressed-cladding waveguide 2 × 2, 1 × 2 and 3 × 3 directional couplers in Tm3+:YAG crystal," Micromachines, Vol. 11, No. 1, 1, 2020.
doi:10.3390/mi11010001        Google Scholar

47. Gualandi, Giulio, Fabio Saretto, Daniele Pedroli, Giacomo Corrielli, Marco Liscidini, Roberto Osellame, and Andrea Crespi, "Tunable integrated ring resonators by femtosecond laser micromachining," APL Photonics, Vol. 11, No. 3, 036110, March 2026.
doi:10.1063/5.0311625        Google Scholar

48. Ross-Adams, Andrew, Toney Teddy Fernandez, Michael Withford, and Simon Gross, "Low bend loss, high index, composite morphology ultra-fast laser written waveguides for photonic integrated circuits," Light: Advanced Manufacturing, Vol. 5, No. 1, 52-61, 2024.
doi:10.37188/lam.2024.009        Google Scholar

49. Wang, Yuying, Lijing Zhong, Kuen Yao Lau, Xuhu Han, Yi Yang, Jiacheng Hu, Sergei Firstov, Zhi Chen, Zhijun Ma, Limin Tong, Kin Seng Chiang, Dezhi Tan, and Jianrong Qiu, "Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics," Light: Science & Applications, Vol. 13, No. 1, 130, June 2024.
doi:10.1038/s41377-024-01473-7        Google Scholar

50. Tan, Dezhi, Zhuo Wang, Beibei Xu, and Jianrong Qiu, "Photonic circuits written by femtosecond laser in glass: Improved fabrication and recent progress in photonic devices," Advanced Photonics, Vol. 3, No. 2, 024002, March 2021.
doi:10.1117/1.ap.3.2.024002        Google Scholar

51. Cheng, Ya, Koji Sugioka, Katsumi Midorikawa, Masashi Masuda, Koichi Toyoda, Masako Kawachi, and Kazuhiko Shihoyama, "Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser," Optics Letters, Vol. 28, No. 1, 55-57, January 2003.
doi:10.1364/ol.28.000055        Google Scholar

52. Ams, M., G. D. Marshall, D. J. Spence, and M. J. Withford, "Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses," Optics Express, Vol. 13, No. 15, 5676-5681, 2005.
doi:10.1364/opex.13.005676        Google Scholar

53. Marshall, Graham D., Alberto Politi, Jonathan C. F. Matthews, Peter Dekker, Martin Ams, Michael J. Withford, and Jeremy L. O’Brien, "Laser written waveguide photonic quantum circuits," Optics Express, Vol. 17, No. 15, 12546-12554, July 2009.
doi:10.1364/oe.17.012546        Google Scholar

54. Tan, Yuanxin, Zongcheng Mou, Jian Xu, Huaiyi Luo, Gaozhan Jiang, Jia Qi, Youting Liang, Haining Chong, Yangjian Cai, and Ya Cheng, "Femtosecond laser three-dimensional isotropic inscription in glass enabled by high-speed rotating slit beam shaping," International Journal of Extreme Manufacturing, Vol. 8, No. 1, 015001, September 2025.
doi:10.1088/2631-7990/ae0539        Google Scholar

55. Zhang, Yuchan, Qilin Jiang, Mingquan Long, Ruozhong Han, Kaiqiang Cao, Shian Zhang, Donghai Feng, Tianqing Jia, Zhenrong Sun, Jianrong Qiu, and Hongxing Xu, "Femtosecond laser-induced periodic structures: Mechanisms, techniques, and applications," Opto-Electronic Science, Vol. 1, No. 6, 220005, 2022.
doi:10.29026/oes.2022.220005        Google Scholar

56. Liao, Yang, Jielei Ni, Lingling Qiao, Min Huang, Yves Bellouard, Koji Sugioka, and Ya Cheng, "High-fidelity visualization of formation of volume nanogratings in porous glass by femtosecond laser irradiation," Optica, Vol. 2, No. 4, 329-334, March 2015.
doi:10.1364/optica.2.000329        Google Scholar

57. Shimotsuma, Yasuhiko, Peter G. Kazansky, Jiarong Qiu, and Kazuoki Hirao, "Self-organized nanogratings in glass irradiated by ultrashort light pulses," Physical Review Letters, Vol. 91, No. 24, 247405, December 2003.
doi:10.1103/physrevlett.91.247405        Google Scholar

58. Taylor, R., C. Hnatovsky, and E. Simova, "Applications of femtosecond laser induced self‐organized planar nanocracks inside fused silica glass," Laser & Photonics Reviews, Vol. 2, No. 1-2, 26-46, April 2008.
doi:10.1002/lpor.200710031        Google Scholar

59. Hnatovsky, C., R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, "Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching," Applied Physics A, Vol. 84, No. 1-2, 47-61, April 2006.
doi:10.1007/s00339-006-3590-4        Google Scholar

60. Lancry, M., F. Zimmerman, R. Desmarchelier, J. Tian, F. Brisset, S. Nolte, and B. Poumellec, "Nanogratings formation in multicomponent silicate glasses," Applied Physics B, Vol. 122, No. 3, 66, March 2016.
doi:10.1007/s00340-016-6337-8        Google Scholar

61. Canning, J., M. Lancry, K. Cook, A. Weickman, F. Brisset, and B. Poumellec, "Anatomy of a femtosecond laser processed silica waveguide [Invited]," Optical Materials Express, Vol. 1, No. 5, 998, August 2011.
doi:10.1364/ome.1.000998        Google Scholar

62. Mishchik, K., G. Cheng, G. Huo, I. M. Burakov, C. Mauclair, A. Mermillod-Blondin, A. Rosenfeld, Y. Ouerdane, A. Boukenter, O. Parriaux, and R. Stoian, "Nanosize structural modifications with polarization functions in ultrafast laser irradiated bulk fused silica," Optics Express, Vol. 18, No. 24, 24809-24824, November 2010.
doi:10.1364/oe.18.024809        Google Scholar

63. Yang, Haiyao, Haoran Mo, Jianzhi Zhang, Lihong Hong, and Zhi-Yuan Li, "Observation of single-molecule Raman spectroscopy enabled by synergic electromagnetic and chemical enhancement," PhotoniX, Vol. 5, No. 1, Article number 3, February 2024.
doi:10.1186/s43074-024-00119-6        Google Scholar

64. Chen, Xingye, Chang Qiao, Tao Jiang, Jiahao Liu, Quan Meng, Yunmin Zeng, Haoyu Chen, Hui Qiao, Dong Li, and Jiamin Wu, "Self-supervised denoising for multimodal structured illumination microscopy enables long-term super-resolution live-cell imaging," PhotoniX, Vol. 5, No. 1, Article number 4, March 2024.
doi:10.1186/s43074-024-00121-y        Google Scholar

65. Goffin, Nicolas, Emilie Buache, Nathalie Lalun, Marion Fernandes, Ines Miguel, Catherine Muller, Charlotte Vaysse, Landry Blanc, Cyril Gobinet, and Olivier Piot, "Characterization of cancer-associated adipocytes by Raman spectroscopy and trajectory inference," PhotoniX, Vol. 5, No. 1, Article number 35, October 2024.
doi:10.1186/s43074-024-00146-3        Google Scholar

66. Park, Jongchan and Liang Gao, "Cascaded compressed-sensing single-pixel camera for high-dimensional optical imaging," PhotoniX, Vol. 5, No. 1, Article number 37, November 2024.
doi:10.1186/s43074-024-00152-5        Google Scholar

67. Shchedrina, Nadezhda, Gergely Nemeth, Ferenc Borondics, Nadege Ollier, and Matthieu Lancry, "Nano-FTIR spectroscopy reveals SiO2 densification within fs-laser induced nanogratings," Nanoscale Advances, Vol. 6, No. 20, 5164-5170, 2024.
doi:10.1039/d4na00409d        Google Scholar

68. Xie, Qiong, Nadezhda Shchedrina, Maxime Cavillon, Bertrand Poumellec, and Matthieu Lancry, "Nanoscale investigations of femtosecond laser induced nanogratings in optical glasses," Nanoscale Advances, Vol. 6, No. 2, 489-498, 2024.
doi:10.1039/d3na00748k        Google Scholar

69. Hnatovsky, C., R. S. Taylor, P. P. Rajeev, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, "Pulse duration dependence of femtosecond-laser-fabricated nanogratings in fused silica," Applied Physics Letters, Vol. 87, 014104, June 2005.
doi:10.1063/1.1991991        Google Scholar

70. Ramirez, Lourdes Patricia R., Matthias Heinrich, Sören Richter, Felix Dreisow, Robert Keil, Alexander V. Korovin, Ulf Peschel, Stefan Nolte, and Andreas Tünnermann, "Tuning the structural properties of femtosecond-laser-induced nanogratings," Applied Physics A, Vol. 100, No. 1, 1-6, April 2010.
doi:10.1007/s00339-010-5684-2        Google Scholar

71. Kazansky, Peter G., Weijia Yang, Erica Bricchi, James Bovatsek, Alan Arai, Yasuhiko Shimotsuma, Kiyotaka Miura, and Kazuyuki Hirao, "“Quill” writing with ultrashort light pulses in transparent materials," Applied Physics Letters, Vol. 90, No. 15, 151120, 2007.
doi:10.1063/1.2722240        Google Scholar

72. Dai, Ye, Guorui Wu, Xian Lin, Guohong Ma, and Jianrong Qiu, "Femtosecond laser induced rotated 3D self-organized nanograting in fused silica," Optics Express, Vol. 20, No. 16, 18072-18078, July 2012.
doi:10.1364/oe.20.018072        Google Scholar

73. Richter, Sören, Matthias Heinrich, Sven Döring, Andreas Tünnermann, Stefan Nolte, and Ulf Peschel, "Nanogratings in fused silica: Formation, control, and applications," Journal of Laser Applications, Vol. 24, No. 4, 042008, July 2012.
doi:10.2351/1.4718561        Google Scholar

74. Bhardwaj, V. R., E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, "Optically produced arrays of planar nanostructures inside fused silica," Physical Review Letters, Vol. 96, 057404, February 2006.
doi:10.1103/physrevlett.96.057404        Google Scholar

75. Stankevič, Valdemar, Gediminas Račiukaitis, Francesca Bragheri, Xuewen Wang, Eugene G. Gamaly, Roberto Osellame, and Saulius Juodkazis, "Laser printed nano-gratings: Orientation and period peculiarities," Scientific Reports, Vol. 7, 39989, January 2017.
doi:10.1038/srep39989        Google Scholar

76. Sakakura, Masaaki, Yuhao Lei, Lei Wang, Yan-Hao Yu, and Peter G. Kazansky, "Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass," Light: Science & Applications, Vol. 9, Article number 15, February 2020.
doi:10.1038/s41377-020-0250-y        Google Scholar

77. Lancry, M., B. Poumellec, A. Chahid-Erraji, M. Beresna, and P. G. Kazansky, "Dependence of the femtosecond laser refractive index change thresholds on the chemical composition of doped-silica glasses," Optical Materials Express, Vol. 1, No. 4, 711-723, July 2011.
doi:10.1364/ome.1.000711        Google Scholar

78. Shimotsuma, Yasuhiko, Sho Kubota, Atsushi Murata, Torataro Kurita, Masaaki Sakakura, Kiyotka Miura, Matthieu Lancry, and Bertrand Poumellec, "Tunability of form birefringence induced by femtosecond laser irradiation in anion-doped silica glass," Journal of the American Ceramic Society, Vol. 100, No. 9, 3912-3919, May 2017.
doi:10.1111/jace.14956        Google Scholar

79. Zhai, Qinxiao, Hongliang Ma, Xian Lin, Yuedong Li, Weiyi Yin, Xinlan Tang, Xianglong Zeng, and Ye Dai, "Evolution of self-organized nanograting from the pre-induced nanocrack-assisted plasma-laser coupling in sapphire," Applied Physics B, Vol. 127, Article number 74, April 2021.
doi:10.1007/s00340-021-07625-6        Google Scholar

80. Yao, Heng, Qiong Xie, Maxime Cavillon, Daniel R. Neuville, Diego Pugliese, Davide Janner, Ye Dai, Bertrand Poumellec, and Matthieu Lancry, "Volume nanogratings inscribed by ultrafast IR laser in alumino-borosilicate glasses," Optics Express, Vol. 31, No. 10, 15449-15460, April 2023.
doi:10.1364/oe.488249        Google Scholar

81. Yao, Heng, Rayan Zaiter, Maxime Cavillon, Pierre Delullier, Bo Lu, Thierry Cardinal, Ye Dai, Bertrand Poumellec, and Matthieu Lancry, "Formation of nanogratings driven by ultrafast laser irradiation in mid-IR heavy oxide glasses," Ceramics International, Vol. 48, No. 21, 31363-31369, November 2022.
doi:10.1016/j.ceramint.2022.07.012        Google Scholar

82. Watanabe, Wataru, Tadamasa Toma, Kazuhiro Yamada, Junji Nishii, Ken-ichi Hayashi, and Kazuyoshi Itoh, "Optical seizing and merging of voids in silica glass with infrared femtosecond laser pulses," Optics Letters, Vol. 25, No. 22, 1669-1671, November 2000.
doi:10.1364/ol.25.001669        Google Scholar

83. Vailionis, Arturas, Eugene G. Gamaly, Vygantas Mizeikis, Wenge Yang, Andrei V. Rode, and Saulius Juodkazis, "Evidence of superdense aluminium synthesized by ultrafast microexplosion," Nature Communications, Vol. 2, Article number 445, August 2011.
doi:10.1038/ncomms1449        Google Scholar

84. Danilov, P. A., A. V. Gorevoy, I. D. Matyaev, I. V. Gritsenko, V. N. Kurlov, and S. I. Kudryashov, "Femtosecond-laser writing of microbits for luminescent memory in sapphire," JETP Letters, Vol. 122, No. 7, 397-404, October 2025.
doi:10.1134/s0021364025608358        Google Scholar

85. Cheng, Weibo, Zhaohui Wang, Xiaolong Liu, Ya Cheng, and Pavel Polynkin, "Microexplosions in bulk sapphire driven by simultaneously spatially and temporally focused femtosecond laser beams," Optics Letters, Vol. 48, No. 3, 751-754, January 2023.
doi:10.1364/ol.482320        Google Scholar

86. Zhang, Guodong, Na Li, Hao Zhang, Huaiyi Wang, Jinlong Xu, Jiang Wang, Jing Wang, Dandan Hui, Yuxi Fu, and Guanghua Cheng, "Pulse duration dependence of material response in ultrafast laser-induced surface-penetrating nanovoids in fused silica," Optics & Laser Technology, Vol. 192, 114065, December 2025.
doi:10.1016/j.optlastec.2025.114065        Google Scholar

87. Rapp, L., R. Meyer, R. Giust, L. Furfaro, M. Jacquot, P. A. Lacourt, J. M. Dudley, and F. Courvoisier, "High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams," Scientific Reports, Vol. 6, No. 1, 34286, September 2016.
doi:10.1038/srep34286        Google Scholar

88. Kanehira, Shingo, Jinhai Si, Jianrong Qiu, Koji Fujita, and Kazuyuki Hirao, "Periodic nanovoid structures via femtosecond laser irradiation," Nano Letters, Vol. 5, No. 8, 1591-1595, July 2005.
doi:10.1021/nl0510154        Google Scholar

89. Li, Tao, Qiang Bian, Zhenrong Zhang, Zhengchen Wang, Donghan Shen, Yang Xiao, Xiaoyan Huang, Qingquan Liang, Jinlong Lu, Jie Li, Yumeng Zheng, and Yang Yu, "Review of recent advances in femtosecond laser direct writing technology of fiber bragg gratings," Photonics, Vol. 13, No. 3, 215, February 2026.
doi:10.3390/photonics13030215        Google Scholar

90. Li, Shaode, Wei He, Zhehai Zhou, Lihang Xu, and Chao Wang, "A heterogeneous step-index fiber Bragg grating fabricated by femtosecond laser point-by-point technique for laser generation," Optics & Laser Technology, Vol. 184, 112543, June 2025.
doi:10.1016/j.optlastec.2025.112543        Google Scholar

91. Jiang, Yajun, Binchuan Sun, Qinghao Bing, Feng Zhou, Kangwei Pan, Yuhui Su, Li Shen, Jiaxin Gao, and Dexing Yang, "Helical-sampled fiber Bragg grating inscribed by a femtosecond laser in a ring core fiber," Optics Letters, Vol. 49, No. 14, 3906-3909, 2024.
doi:10.1364/ol.528144        Google Scholar

92. Sosa, Matilde, Maxime Cavillon, Thomas Blanchet, Gergely Nemeth, Ferenc Borondics, Guillaume Laffont, and Matthieu Lancry, "Micro-to-nanoscale characterization of femtosecond laser photo-inscribed microvoids," Nanomaterials, Vol. 14, No. 14, 1228, July 2024.
doi:10.3390/nano14141228        Google Scholar

93. Chen, Runxiao, Jun He, Xizhen Xu, Jiafeng Wu, Ying Wang, and Yiping Wang, "High-quality fiber bragg gratings inscribed by femtosecond laser point-by-point technology," Micromachines, Vol. 13, No. 11, 1808, October 2022.
doi:10.3390/mi13111808        Google Scholar

94. Sosa, Matilde, Maxime Cavillon, Thomas Blanchet, Matthieu Lancry, and Guillaume Laffont, "Spectral and microscopic behavior of type III femtosecond fiber bragg gratings at high temperatures," Micromachines, Vol. 16, No. 3, 331, March 2025.
doi:10.3390/mi16030331        Google Scholar

95. Glezer, E. N., M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, "Three-dimensional optical storage inside transparent materials," Optics Letters, Vol. 21, No. 24, 2023, December 1996.
doi:10.1364/ol.21.002023        Google Scholar

96. Juodkazis, S., A. V. Rode, E. G. Gamaly, S. Matsuo, and H. Misawa, "Recording and reading of three-dimensional optical memory in glasses," Applied Physics B, Vol. 77, No. 2-3, 361-368, August 2003.
doi:10.1007/s00340-003-1224-5        Google Scholar

97. Shimotsuma, Yasuhiko, Masaaki Sakakura, Peter G. Kazansky, Martynas Beresna, Jiarong Qiu, Kiyotaka Miura, and Kazuyuki Hirao, "Ultrafast manipulation of self-assembled form birefringence in glass," Advanced Materials, Vol. 22, No. 36, 4039-4043, August 2010.
doi:10.1002/adma.201000921        Google Scholar

98. Beresna, Martynas, Mindaugas Gecevičius, Peter G. Kazansky, Thomas Taylor, and Alexey V. Kavokin, "Exciton mediated self-organization in glass driven by ultrashort light pulses," Applied Physics Letters, Vol. 101, No. 5, 053120, July 2012.
doi:10.1063/1.4742899        Google Scholar

99. Zhang, Jingyu, Mindaugas Gecevičius, Martynas Beresna, and Peter G. Kazansky, "Seemingly unlimited lifetime data storage in nanostructured glass," Physical Review Letters, Vol. 112, No. 3, 033901, January 2014.
doi:10.1103/physrevlett.112.033901        Google Scholar

100. Ye, Minxin, Yuhao Lei, Xin Zhang, Lei Wang, and Shih-Chi Chen, "Parallel writing of 5D optical data via shaped voxels," Science Advances, Vol. 11, No. 29, July 2025.
doi:10.1126/sciadv.adx7335        Google Scholar

101. Allison, J., Patrick Anderson, Erika Aranas, Youssef Assaf, Richard Black, Marco Caballero, Burcu Canakci, John Antony Chattaway, Andromachi Chatzieleftheriou, James Clegg, Daniel Cletheroe, Bridgette Cooper, Tim Deegan, Austin Donnelly, Rokas Drevinskas, Zhonghe Feng, Christos Gkantsidis, Ariel Gomez Diaz, Istvan Haller, Freddie Hong, Teodora Ilieva, Russell Joyce, Valentin Kapitany, Mint Kunkel, David Lara, Takashi Lawson, Sergey Legtchenko, Fanglin Liu, Xiaoqi Liu, Bruno Magalhaes, Sebastian Nowozin, Hiske Overweg, Antony Rowstron, Masaaki Sakakura, Nina Schreiner, Adam Smith, Oliver Snowdon, Ioan Stefanovici, David Sweeney, Govert Verkes, Phil Wainman, Charles Whittaker, Pablo Wilke Berenguer, Hugh Williams, Thomas Winkler, and Stefan Winzeck, "Laser writing in glass for dense, fast and efficient archival data storage," Nature, Vol. 650, No. 8102, 606-612, February 2026.
doi:10.1038/s41586-025-10042-w        Google Scholar

102. Liu, Hongliang, Javier R. Vazquez de Aldana, Minghui Hong, and Feng Chen, "Femtosecond laser inscribed Y-branch waveguide in Nd:YAG Crystal: Fabrication and continuous-wave lasing," IEEE Journal of Selected Topics in Quantum Electronics, Vol. 22, No. 2, 227-230, March 2016.
doi:10.1109/jstqe.2015.2439191        Google Scholar

103. Zhang, Qian, Meng Li, Jian Xu, Zijie Lin, Haofeng Yu, Min Wang, Zhiwei Fang, Ya Cheng, Qihuang Gong, and Yan Li, "Reconfigurable directional coupler in lithium niobate crystal fabricated by three-dimensional femtosecond laser focal field engineering," Photonics Research, Vol. 7, No. 5, 503-507, April 2019.
doi:10.1364/prj.7.000503        Google Scholar

104. Chen, Tao, Zhangqi Dang, Zeyu Deng, Shijie Ke, Zhenming Ding, and Ziyang Zhang, "Large-scale optical switches by thermo-optic waveguide lens," PhotoniX, Vol. 5, No. 1, 14, April 2024.
doi:10.1186/s43074-024-00131-w        Google Scholar

105. Lapointe, Jerome, Cedrik Coia, Albert Dupont, and Réal Vallée, "Passive broadband Faraday isolator for hybrid integration to photonic circuits without lens and external magnet," Nature Photonics, Vol. 19, No. 3, 248-257, January 2025.
doi:10.1038/s41566-024-01601-0        Google Scholar

106. Chen, Minjia and Qixiang Cheng, "Multimode communication with programmable photonic integrated mesh," PhotoniX, Vol. 5, Article number 28, October 2024.
doi:10.1186/s43074-024-00145-4        Google Scholar

107. Zhou, Wen-Hao, Xiao-Wei Wang, Ruo-Jing Ren, Yu-Xuan Fu, Yi-Jun Chang, Xiao-Yun Xu, Hao Tang, and Xian-Min Jin, "Multi-particle quantum walks on 3D integrated photonic chip," Light: Science & Applications, Vol. 13, Article number 296, October 2024.
doi:10.1038/s41377-024-01627-7        Google Scholar

108. Xu, Shuai, Hua Fan, Zhen-Ze Li, Jian-Guan Hua, Yan-Hao Yu, Lei Wang, Qi-Dai Chen, and Hong-Bo Sun, "Ultrafast laser-inscribed nanogratings in sapphire for geometric phase elements," Optics Letters, Vol. 46, No. 3, 536-539, January 2021.
doi:10.1364/ol.413177        Google Scholar

109. Berkovic, G., S. Zilberman, Y. London, M. Dadon, E. Shafir, O. Ozeri, K. Ben-Meir, A. Krakovich, and T. Makmal, "Qualification of a fiber bragg grating temperature sensor for operation in a nuclear reactor core," Optica Sensing Congress 2023, 2023.
doi:10.1364/SENSORS.2023.SW3D.2

110. Grobnic, D., C. W. Smelser, S. J. Mihailov, and R. B. Walker, "Long-term thermal stability tests at 1000 °C of silica fibre Bragg gratings made with ultrafast laser radiation," Measurement Science and Technology, Vol. 17, No. 5, 1009-1013, April 2006.
doi:10.1088/0957-0233/17/5/s12        Google Scholar

111. Wei, Shu-En, Yitao Wang, Heng Yao, Maxime Cavillon, Bertrand Poumellec, Gang-Ding Peng, and Matthieu Lancry, "Thermal stability of type II modifications by IR femtosecond laser in silica-based glasses," Sensors, Vol. 20, No. 3, 762, January 2020.
doi:10.3390/s20030762        Google Scholar

112. Wang, Yitao, Maxime Cavillon, John Ballato, Thomas Hawkins, Tino Elsmann, Manfred Rothhardt, Rudy Desmarchelier, Guillaume Laffont, Bertrand Poumellec, and Matthieu Lancry, "3D laser engineering of molten core optical fibers: Toward a new generation of harsh environment sensing devices," Advanced Optical Materials, Vol. 10, No. 18, 2200379, June 2022.
doi:10.1002/adom.202200379        Google Scholar

113. Wang, Mohan, Kehao Zhao, Jingyu Wu, Yuqi Li, Yang Yang, Sheng Huang, Jieru Zhao, Thomas Tweedle, David Carpenter, Guiqiu Zheng, Qingxu Yu, and Kevin P. Chen, "Femtosecond laser fabrication of nanograting-based distributed fiber sensors for extreme environmental applications," International Journal of Extreme Manufacturing, Vol. 3, No. 2, 025401, February 2021.
doi:10.1088/2631-7990/abe171        Google Scholar